5/17/2010	9:29:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	9:29:53 AM	Recipe started at 9:29 AM
5/17/2010	9:29:53 AM	H2 valve closed
5/17/2010	9:29:53 AM	BCl3 valve closed
5/17/2010	9:29:53 AM	PH3 valve closed
5/17/2010	9:29:53 AM	SiCl4 pre valve closed
5/17/2010	9:29:53 AM	SiCl4 post valve closed
5/17/2010	9:29:53 AM	Main Vac valve closed
5/17/2010	9:29:53 AM	Bypass valve closed
5/17/2010	9:29:53 AM	Bubbler valve closed
5/17/2010	9:29:53 AM	Helium valve opened
5/17/2010	9:29:53 AM	Helium MFC set to  500.000000
5/17/2010	9:29:53 AM	H2 MFC set to  0.000000
5/17/2010	9:29:53 AM	BCl3 MFC set to  0.000000
5/17/2010	9:29:53 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:29:53 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:29:53 AM	Tube furnace set to 0
5/17/2010	9:31:14 AM	Helium valve closed
5/17/2010	9:31:14 AM	H2 valve closed
5/17/2010	9:31:14 AM	BCl3 valve closed
5/17/2010	9:31:14 AM	PH3 valve closed
5/17/2010	9:31:14 AM	SiCl4 pre valve closed
5/17/2010	9:31:14 AM	SiCl4 post valve closed
5/17/2010	9:31:14 AM	Main Vac valve closed
5/17/2010	9:31:14 AM	Bypass valve closed
5/17/2010	9:31:14 AM	Bubbler valve closed
5/17/2010	9:31:14 AM	Helium MFC set to  0.000000
5/17/2010	9:31:14 AM	H2 MFC set to  0.000000
5/17/2010	9:31:14 AM	BCl3 MFC set to  0.000000
5/17/2010	9:31:14 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:31:14 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:31:14 AM	Tube furnace set to 0
5/17/2010	9:31:15 AM	Run finished at 9:31 AM
5/17/2010	9:31:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	9:33:16 AM	Recipe started at 9:33 AM
5/17/2010	9:33:16 AM	H2 valve closed
5/17/2010	9:33:16 AM	BCl3 valve closed
5/17/2010	9:33:16 AM	PH3 valve closed
5/17/2010	9:33:16 AM	SiCl4 pre valve closed
5/17/2010	9:33:16 AM	SiCl4 post valve closed
5/17/2010	9:33:16 AM	Main Vac valve closed
5/17/2010	9:33:16 AM	Bypass valve closed
5/17/2010	9:33:16 AM	Bubbler valve closed
5/17/2010	9:33:16 AM	Helium valve opened
5/17/2010	9:33:16 AM	Helium MFC set to  500.000000
5/17/2010	9:33:16 AM	H2 MFC set to  0.000000
5/17/2010	9:33:16 AM	BCl3 MFC set to  0.000000
5/17/2010	9:33:16 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:33:16 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:33:16 AM	Tube furnace set to 0
5/17/2010	9:33:19 AM	H2 valve closed
5/17/2010	9:33:19 AM	BCl3 valve closed
5/17/2010	9:33:19 AM	PH3 valve closed
5/17/2010	9:33:19 AM	SiCl4 pre valve closed
5/17/2010	9:33:19 AM	SiCl4 post valve closed
5/17/2010	9:33:19 AM	Main Vac valve closed
5/17/2010	9:33:19 AM	Bypass valve closed
5/17/2010	9:33:19 AM	Helium valve opened
5/17/2010	9:33:19 AM	Bubbler valve opened
5/17/2010	9:33:19 AM	Helium MFC set to  500.000000
5/17/2010	9:33:19 AM	H2 MFC set to  0.000000
5/17/2010	9:33:19 AM	BCl3 MFC set to  0.000000
5/17/2010	9:33:19 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:33:19 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:33:19 AM	Tube furnace set to 0
5/17/2010	9:38:31 AM	Helium valve closed
5/17/2010	9:38:31 AM	H2 valve closed
5/17/2010	9:38:31 AM	BCl3 valve closed
5/17/2010	9:38:31 AM	PH3 valve closed
5/17/2010	9:38:31 AM	SiCl4 pre valve closed
5/17/2010	9:38:31 AM	SiCl4 post valve closed
5/17/2010	9:38:31 AM	Main Vac valve closed
5/17/2010	9:38:31 AM	Bypass valve closed
5/17/2010	9:38:31 AM	Bubbler valve closed
5/17/2010	9:38:31 AM	Helium MFC set to  0.000000
5/17/2010	9:38:31 AM	H2 MFC set to  0.000000
5/17/2010	9:38:31 AM	BCl3 MFC set to  0.000000
5/17/2010	9:38:31 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:38:31 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:38:31 AM	Tube furnace set to 0
5/17/2010	9:38:32 AM	Run finished at 9:38 AM
5/17/2010	9:44:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	9:44:32 AM	Recipe started at 9:44 AM
5/17/2010	9:44:32 AM	H2 valve closed
5/17/2010	9:44:32 AM	BCl3 valve closed
5/17/2010	9:44:32 AM	PH3 valve closed
5/17/2010	9:44:32 AM	SiCl4 pre valve closed
5/17/2010	9:44:32 AM	SiCl4 post valve closed
5/17/2010	9:44:32 AM	Main Vac valve closed
5/17/2010	9:44:32 AM	Bypass valve closed
5/17/2010	9:44:32 AM	Bubbler valve closed
5/17/2010	9:44:32 AM	Helium valve opened
5/17/2010	9:44:32 AM	Helium MFC set to  500.000000
5/17/2010	9:44:32 AM	H2 MFC set to  0.000000
5/17/2010	9:44:32 AM	BCl3 MFC set to  0.000000
5/17/2010	9:44:32 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:44:32 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:44:32 AM	Tube furnace set to 0
5/17/2010	9:44:34 AM	Helium valve closed
5/17/2010	9:44:34 AM	H2 valve closed
5/17/2010	9:44:34 AM	BCl3 valve closed
5/17/2010	9:44:34 AM	PH3 valve closed
5/17/2010	9:44:34 AM	SiCl4 pre valve closed
5/17/2010	9:44:34 AM	SiCl4 post valve closed
5/17/2010	9:44:34 AM	Main Vac valve closed
5/17/2010	9:44:34 AM	Bypass valve closed
5/17/2010	9:44:34 AM	Bubbler valve closed
5/17/2010	9:44:34 AM	Helium MFC set to  0.000000
5/17/2010	9:44:34 AM	H2 MFC set to  0.000000
5/17/2010	9:44:34 AM	BCl3 MFC set to  0.000000
5/17/2010	9:44:34 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:44:34 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:44:34 AM	Tube furnace set to 0
5/17/2010	9:44:38 AM	Helium valve closed
5/17/2010	9:44:38 AM	H2 valve closed
5/17/2010	9:44:38 AM	BCl3 valve closed
5/17/2010	9:44:38 AM	PH3 valve closed
5/17/2010	9:44:38 AM	SiCl4 pre valve closed
5/17/2010	9:44:38 AM	SiCl4 post valve closed
5/17/2010	9:44:38 AM	Main Vac valve closed
5/17/2010	9:44:38 AM	Bubbler valve closed
5/17/2010	9:44:38 AM	Bypass valve opened
5/17/2010	9:44:38 AM	Helium MFC set to  0.000000
5/17/2010	9:44:38 AM	H2 MFC set to  0.000000
5/17/2010	9:44:38 AM	BCl3 MFC set to  0.000000
5/17/2010	9:44:38 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:44:38 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:44:38 AM	Tube furnace set to 0
5/17/2010	9:45:24 AM	Helium valve closed
5/17/2010	9:45:24 AM	H2 valve closed
5/17/2010	9:45:24 AM	BCl3 valve closed
5/17/2010	9:45:24 AM	PH3 valve closed
5/17/2010	9:45:24 AM	SiCl4 pre valve closed
5/17/2010	9:45:24 AM	SiCl4 post valve closed
5/17/2010	9:45:24 AM	Bubbler valve closed
5/17/2010	9:45:24 AM	Main Vac valve opened
5/17/2010	9:45:24 AM	Bypass valve opened
5/17/2010	9:45:24 AM	Helium MFC set to  0.000000
5/17/2010	9:45:24 AM	H2 MFC set to  0.000000
5/17/2010	9:45:24 AM	BCl3 MFC set to  0.000000
5/17/2010	9:45:24 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:45:24 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:45:24 AM	Tube furnace set to 0
5/17/2010	9:47:28 AM	H2 valve closed
5/17/2010	9:47:28 AM	BCl3 valve closed
5/17/2010	9:47:28 AM	PH3 valve closed
5/17/2010	9:47:28 AM	SiCl4 pre valve closed
5/17/2010	9:47:28 AM	SiCl4 post valve closed
5/17/2010	9:47:28 AM	Main Vac valve closed
5/17/2010	9:47:28 AM	Bypass valve closed
5/17/2010	9:47:28 AM	Bubbler valve closed
5/17/2010	9:47:28 AM	Helium valve opened
5/17/2010	9:47:28 AM	Helium MFC set to  500.000000
5/17/2010	9:47:28 AM	H2 MFC set to  0.000000
5/17/2010	9:47:28 AM	BCl3 MFC set to  0.000000
5/17/2010	9:47:28 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:47:28 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:47:28 AM	Tube furnace set to 0
5/17/2010	9:48:10 AM	Helium valve closed
5/17/2010	9:48:10 AM	H2 valve closed
5/17/2010	9:48:10 AM	BCl3 valve closed
5/17/2010	9:48:10 AM	PH3 valve closed
5/17/2010	9:48:10 AM	SiCl4 pre valve closed
5/17/2010	9:48:10 AM	SiCl4 post valve closed
5/17/2010	9:48:10 AM	Main Vac valve closed
5/17/2010	9:48:10 AM	Bypass valve closed
5/17/2010	9:48:10 AM	Bubbler valve closed
5/17/2010	9:48:10 AM	Helium MFC set to  0.000000
5/17/2010	9:48:10 AM	H2 MFC set to  0.000000
5/17/2010	9:48:10 AM	BCl3 MFC set to  0.000000
5/17/2010	9:48:10 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:48:10 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:48:10 AM	Tube furnace set to 0
5/17/2010	9:48:25 AM	Helium valve closed
5/17/2010	9:48:25 AM	H2 valve closed
5/17/2010	9:48:25 AM	BCl3 valve closed
5/17/2010	9:48:25 AM	PH3 valve closed
5/17/2010	9:48:25 AM	SiCl4 pre valve closed
5/17/2010	9:48:25 AM	SiCl4 post valve closed
5/17/2010	9:48:25 AM	Main Vac valve closed
5/17/2010	9:48:25 AM	Bubbler valve closed
5/17/2010	9:48:25 AM	Bypass valve opened
5/17/2010	9:48:25 AM	Helium MFC set to  0.000000
5/17/2010	9:48:25 AM	H2 MFC set to  0.000000
5/17/2010	9:48:25 AM	BCl3 MFC set to  0.000000
5/17/2010	9:48:25 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:48:25 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:48:25 AM	Tube furnace set to 0
5/17/2010	9:48:53 AM	Helium valve closed
5/17/2010	9:48:53 AM	H2 valve closed
5/17/2010	9:48:53 AM	BCl3 valve closed
5/17/2010	9:48:53 AM	PH3 valve closed
5/17/2010	9:48:53 AM	SiCl4 pre valve closed
5/17/2010	9:48:53 AM	SiCl4 post valve closed
5/17/2010	9:48:53 AM	Bubbler valve closed
5/17/2010	9:48:53 AM	Main Vac valve opened
5/17/2010	9:48:53 AM	Bypass valve opened
5/17/2010	9:48:53 AM	Helium MFC set to  0.000000
5/17/2010	9:48:53 AM	H2 MFC set to  0.000000
5/17/2010	9:48:53 AM	BCl3 MFC set to  0.000000
5/17/2010	9:48:53 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:48:53 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:48:53 AM	Tube furnace set to 0
5/17/2010	9:53:53 AM	H2 valve closed
5/17/2010	9:53:53 AM	BCl3 valve closed
5/17/2010	9:53:53 AM	PH3 valve closed
5/17/2010	9:53:53 AM	SiCl4 pre valve closed
5/17/2010	9:53:53 AM	SiCl4 post valve closed
5/17/2010	9:53:53 AM	Main Vac valve closed
5/17/2010	9:53:53 AM	Bypass valve closed
5/17/2010	9:53:53 AM	Bubbler valve closed
5/17/2010	9:53:53 AM	Helium valve opened
5/17/2010	9:53:53 AM	Helium MFC set to  500.000000
5/17/2010	9:53:53 AM	H2 MFC set to  0.000000
5/17/2010	9:53:53 AM	BCl3 MFC set to  0.000000
5/17/2010	9:53:53 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:53:53 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:53:53 AM	Tube furnace set to 0
5/17/2010	9:55:04 AM	Helium valve closed
5/17/2010	9:55:04 AM	H2 valve closed
5/17/2010	9:55:04 AM	BCl3 valve closed
5/17/2010	9:55:04 AM	PH3 valve closed
5/17/2010	9:55:04 AM	SiCl4 pre valve closed
5/17/2010	9:55:04 AM	SiCl4 post valve closed
5/17/2010	9:55:04 AM	Main Vac valve closed
5/17/2010	9:55:04 AM	Bypass valve closed
5/17/2010	9:55:04 AM	Bubbler valve closed
5/17/2010	9:55:04 AM	Helium MFC set to  0.000000
5/17/2010	9:55:04 AM	H2 MFC set to  0.000000
5/17/2010	9:55:04 AM	BCl3 MFC set to  0.000000
5/17/2010	9:55:04 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:55:04 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:55:04 AM	Tube furnace set to 0
5/17/2010	9:55:19 AM	Helium valve closed
5/17/2010	9:55:19 AM	H2 valve closed
5/17/2010	9:55:19 AM	BCl3 valve closed
5/17/2010	9:55:19 AM	PH3 valve closed
5/17/2010	9:55:19 AM	SiCl4 pre valve closed
5/17/2010	9:55:19 AM	SiCl4 post valve closed
5/17/2010	9:55:19 AM	Main Vac valve closed
5/17/2010	9:55:19 AM	Bubbler valve closed
5/17/2010	9:55:19 AM	Bypass valve opened
5/17/2010	9:55:19 AM	Helium MFC set to  0.000000
5/17/2010	9:55:19 AM	H2 MFC set to  0.000000
5/17/2010	9:55:19 AM	BCl3 MFC set to  0.000000
5/17/2010	9:55:19 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:55:19 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:55:19 AM	Tube furnace set to 0
5/17/2010	9:55:51 AM	Helium valve closed
5/17/2010	9:55:51 AM	H2 valve closed
5/17/2010	9:55:51 AM	BCl3 valve closed
5/17/2010	9:55:51 AM	PH3 valve closed
5/17/2010	9:55:51 AM	SiCl4 pre valve closed
5/17/2010	9:55:51 AM	SiCl4 post valve closed
5/17/2010	9:55:51 AM	Bubbler valve closed
5/17/2010	9:55:51 AM	Main Vac valve opened
5/17/2010	9:55:51 AM	Bypass valve opened
5/17/2010	9:55:51 AM	Helium MFC set to  0.000000
5/17/2010	9:55:51 AM	H2 MFC set to  0.000000
5/17/2010	9:55:51 AM	BCl3 MFC set to  0.000000
5/17/2010	9:55:51 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:55:51 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:55:51 AM	Tube furnace set to 0
5/17/2010	9:58:19 AM	Helium valve closed
5/17/2010	9:58:19 AM	H2 valve closed
5/17/2010	9:58:19 AM	BCl3 valve closed
5/17/2010	9:58:19 AM	PH3 valve closed
5/17/2010	9:58:19 AM	SiCl4 pre valve closed
5/17/2010	9:58:19 AM	SiCl4 post valve closed
5/17/2010	9:58:19 AM	Bubbler valve closed
5/17/2010	9:58:19 AM	Main Vac valve opened
5/17/2010	9:58:19 AM	Bypass valve opened
5/17/2010	9:58:19 AM	Helium MFC set to  0.000000
5/17/2010	9:58:19 AM	H2 MFC set to  0.000000
5/17/2010	9:58:19 AM	BCl3 MFC set to  0.000000
5/17/2010	9:58:19 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:58:19 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:58:19 AM	Tube furnace set to 0
5/17/2010	9:58:20 AM	Run finished at 9:58 AM
5/17/2010	9:58:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	9:58:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	9:58:27 AM	Recipe started at 9:58 AM
5/17/2010	9:58:27 AM	H2 valve closed
5/17/2010	9:58:27 AM	BCl3 valve closed
5/17/2010	9:58:27 AM	PH3 valve closed
5/17/2010	9:58:27 AM	SiCl4 pre valve closed
5/17/2010	9:58:27 AM	SiCl4 post valve closed
5/17/2010	9:58:27 AM	Main Vac valve closed
5/17/2010	9:58:27 AM	Bypass valve closed
5/17/2010	9:58:27 AM	Bubbler valve closed
5/17/2010	9:58:27 AM	Helium valve opened
5/17/2010	9:58:27 AM	Helium MFC set to  500.000000
5/17/2010	9:58:27 AM	H2 MFC set to  0.000000
5/17/2010	9:58:27 AM	BCl3 MFC set to  0.000000
5/17/2010	9:58:27 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:58:27 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:58:27 AM	Tube furnace set to 0
5/17/2010	9:59:19 AM	Helium valve closed
5/17/2010	9:59:19 AM	H2 valve closed
5/17/2010	9:59:19 AM	BCl3 valve closed
5/17/2010	9:59:19 AM	PH3 valve closed
5/17/2010	9:59:19 AM	SiCl4 pre valve closed
5/17/2010	9:59:19 AM	SiCl4 post valve closed
5/17/2010	9:59:19 AM	Main Vac valve closed
5/17/2010	9:59:19 AM	Bypass valve closed
5/17/2010	9:59:19 AM	Bubbler valve closed
5/17/2010	9:59:19 AM	Helium MFC set to  0.000000
5/17/2010	9:59:19 AM	H2 MFC set to  0.000000
5/17/2010	9:59:19 AM	BCl3 MFC set to  0.000000
5/17/2010	9:59:19 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:59:19 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:59:19 AM	Tube furnace set to 0
5/17/2010	9:59:34 AM	Helium valve closed
5/17/2010	9:59:34 AM	H2 valve closed
5/17/2010	9:59:34 AM	BCl3 valve closed
5/17/2010	9:59:34 AM	PH3 valve closed
5/17/2010	9:59:34 AM	SiCl4 pre valve closed
5/17/2010	9:59:34 AM	SiCl4 post valve closed
5/17/2010	9:59:34 AM	Main Vac valve closed
5/17/2010	9:59:34 AM	Bubbler valve closed
5/17/2010	9:59:34 AM	Bypass valve opened
5/17/2010	9:59:34 AM	Helium MFC set to  0.000000
5/17/2010	9:59:34 AM	H2 MFC set to  0.000000
5/17/2010	9:59:34 AM	BCl3 MFC set to  0.000000
5/17/2010	9:59:34 AM	SiCl4 MFC set to  0.000000
5/17/2010	9:59:34 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	9:59:34 AM	Tube furnace set to 0
5/17/2010	10:00:03 AM	Helium valve closed
5/17/2010	10:00:03 AM	H2 valve closed
5/17/2010	10:00:03 AM	BCl3 valve closed
5/17/2010	10:00:03 AM	PH3 valve closed
5/17/2010	10:00:03 AM	SiCl4 pre valve closed
5/17/2010	10:00:03 AM	SiCl4 post valve closed
5/17/2010	10:00:03 AM	Bubbler valve closed
5/17/2010	10:00:03 AM	Main Vac valve opened
5/17/2010	10:00:03 AM	Bypass valve opened
5/17/2010	10:00:03 AM	Helium MFC set to  0.000000
5/17/2010	10:00:03 AM	H2 MFC set to  0.000000
5/17/2010	10:00:03 AM	BCl3 MFC set to  0.000000
5/17/2010	10:00:03 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:00:03 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:00:03 AM	Tube furnace set to 0
5/17/2010	10:02:33 AM	H2 valve closed
5/17/2010	10:02:33 AM	BCl3 valve closed
5/17/2010	10:02:33 AM	PH3 valve closed
5/17/2010	10:02:33 AM	SiCl4 pre valve closed
5/17/2010	10:02:33 AM	SiCl4 post valve closed
5/17/2010	10:02:33 AM	Main Vac valve closed
5/17/2010	10:02:33 AM	Bypass valve closed
5/17/2010	10:02:33 AM	Bubbler valve closed
5/17/2010	10:02:33 AM	Helium valve opened
5/17/2010	10:02:33 AM	Helium MFC set to  500.000000
5/17/2010	10:02:33 AM	H2 MFC set to  0.000000
5/17/2010	10:02:33 AM	BCl3 MFC set to  0.000000
5/17/2010	10:02:33 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:02:33 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:02:33 AM	Tube furnace set to 0
5/17/2010	10:03:57 AM	Helium valve closed
5/17/2010	10:03:57 AM	H2 valve closed
5/17/2010	10:03:57 AM	BCl3 valve closed
5/17/2010	10:03:57 AM	PH3 valve closed
5/17/2010	10:03:57 AM	SiCl4 pre valve closed
5/17/2010	10:03:57 AM	SiCl4 post valve closed
5/17/2010	10:03:57 AM	Main Vac valve closed
5/17/2010	10:03:57 AM	Bypass valve closed
5/17/2010	10:03:57 AM	Bubbler valve closed
5/17/2010	10:03:57 AM	Helium MFC set to  0.000000
5/17/2010	10:03:57 AM	H2 MFC set to  0.000000
5/17/2010	10:03:57 AM	BCl3 MFC set to  0.000000
5/17/2010	10:03:57 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:03:57 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:03:57 AM	Tube furnace set to 0
5/17/2010	10:04:12 AM	Helium valve closed
5/17/2010	10:04:12 AM	H2 valve closed
5/17/2010	10:04:12 AM	BCl3 valve closed
5/17/2010	10:04:12 AM	PH3 valve closed
5/17/2010	10:04:12 AM	SiCl4 pre valve closed
5/17/2010	10:04:12 AM	SiCl4 post valve closed
5/17/2010	10:04:12 AM	Main Vac valve closed
5/17/2010	10:04:12 AM	Bubbler valve closed
5/17/2010	10:04:12 AM	Bypass valve opened
5/17/2010	10:04:12 AM	Helium MFC set to  0.000000
5/17/2010	10:04:12 AM	H2 MFC set to  0.000000
5/17/2010	10:04:12 AM	BCl3 MFC set to  0.000000
5/17/2010	10:04:12 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:04:12 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:04:12 AM	Tube furnace set to 0
5/17/2010	10:04:45 AM	Helium valve closed
5/17/2010	10:04:45 AM	H2 valve closed
5/17/2010	10:04:45 AM	BCl3 valve closed
5/17/2010	10:04:45 AM	PH3 valve closed
5/17/2010	10:04:45 AM	SiCl4 pre valve closed
5/17/2010	10:04:45 AM	SiCl4 post valve closed
5/17/2010	10:04:45 AM	Bubbler valve closed
5/17/2010	10:04:45 AM	Main Vac valve opened
5/17/2010	10:04:45 AM	Bypass valve opened
5/17/2010	10:04:45 AM	Helium MFC set to  0.000000
5/17/2010	10:04:45 AM	H2 MFC set to  0.000000
5/17/2010	10:04:45 AM	BCl3 MFC set to  0.000000
5/17/2010	10:04:45 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:04:45 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:04:45 AM	Tube furnace set to 0
5/17/2010	10:09:45 AM	H2 valve closed
5/17/2010	10:09:45 AM	BCl3 valve closed
5/17/2010	10:09:45 AM	PH3 valve closed
5/17/2010	10:09:45 AM	SiCl4 pre valve closed
5/17/2010	10:09:45 AM	SiCl4 post valve closed
5/17/2010	10:09:45 AM	Main Vac valve closed
5/17/2010	10:09:45 AM	Bypass valve closed
5/17/2010	10:09:45 AM	Bubbler valve closed
5/17/2010	10:09:45 AM	Helium valve opened
5/17/2010	10:09:45 AM	Helium MFC set to  500.000000
5/17/2010	10:09:45 AM	H2 MFC set to  0.000000
5/17/2010	10:09:45 AM	BCl3 MFC set to  0.000000
5/17/2010	10:09:45 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:09:45 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:09:45 AM	Tube furnace set to 0
5/17/2010	10:11:08 AM	Helium valve closed
5/17/2010	10:11:08 AM	H2 valve closed
5/17/2010	10:11:08 AM	BCl3 valve closed
5/17/2010	10:11:08 AM	PH3 valve closed
5/17/2010	10:11:08 AM	SiCl4 pre valve closed
5/17/2010	10:11:08 AM	SiCl4 post valve closed
5/17/2010	10:11:08 AM	Main Vac valve closed
5/17/2010	10:11:08 AM	Bypass valve closed
5/17/2010	10:11:08 AM	Bubbler valve closed
5/17/2010	10:11:08 AM	Helium MFC set to  0.000000
5/17/2010	10:11:08 AM	H2 MFC set to  0.000000
5/17/2010	10:11:08 AM	BCl3 MFC set to  0.000000
5/17/2010	10:11:08 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:11:08 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:11:09 AM	Tube furnace set to 0
5/17/2010	10:11:24 AM	Helium valve closed
5/17/2010	10:11:24 AM	H2 valve closed
5/17/2010	10:11:24 AM	BCl3 valve closed
5/17/2010	10:11:24 AM	PH3 valve closed
5/17/2010	10:11:24 AM	SiCl4 pre valve closed
5/17/2010	10:11:24 AM	SiCl4 post valve closed
5/17/2010	10:11:24 AM	Main Vac valve closed
5/17/2010	10:11:24 AM	Bubbler valve closed
5/17/2010	10:11:24 AM	Bypass valve opened
5/17/2010	10:11:24 AM	Helium MFC set to  0.000000
5/17/2010	10:11:24 AM	H2 MFC set to  0.000000
5/17/2010	10:11:24 AM	BCl3 MFC set to  0.000000
5/17/2010	10:11:24 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:11:24 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:11:24 AM	Tube furnace set to 0
5/17/2010	10:11:57 AM	Helium valve closed
5/17/2010	10:11:57 AM	H2 valve closed
5/17/2010	10:11:57 AM	BCl3 valve closed
5/17/2010	10:11:57 AM	PH3 valve closed
5/17/2010	10:11:57 AM	SiCl4 pre valve closed
5/17/2010	10:11:57 AM	SiCl4 post valve closed
5/17/2010	10:11:57 AM	Bubbler valve closed
5/17/2010	10:11:57 AM	Main Vac valve opened
5/17/2010	10:11:57 AM	Bypass valve opened
5/17/2010	10:11:57 AM	Helium MFC set to  0.000000
5/17/2010	10:11:57 AM	H2 MFC set to  0.000000
5/17/2010	10:11:57 AM	BCl3 MFC set to  0.000000
5/17/2010	10:11:57 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:11:57 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:11:57 AM	Tube furnace set to 0
5/17/2010	10:14:05 AM	Helium valve closed
5/17/2010	10:14:05 AM	H2 valve closed
5/17/2010	10:14:05 AM	BCl3 valve closed
5/17/2010	10:14:05 AM	PH3 valve closed
5/17/2010	10:14:05 AM	SiCl4 pre valve closed
5/17/2010	10:14:05 AM	SiCl4 post valve closed
5/17/2010	10:14:05 AM	Bubbler valve closed
5/17/2010	10:14:05 AM	Main Vac valve opened
5/17/2010	10:14:05 AM	Bypass valve opened
5/17/2010	10:14:05 AM	Helium MFC set to  0.000000
5/17/2010	10:14:05 AM	H2 MFC set to  0.000000
5/17/2010	10:14:05 AM	BCl3 MFC set to  0.000000
5/17/2010	10:14:05 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:14:05 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:14:05 AM	Tube furnace set to 0
5/17/2010	10:14:06 AM	Run finished at 10:14 AM
5/17/2010	10:14:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	10:14:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	10:14:18 AM	Recipe started at 10:14 AM
5/17/2010	10:14:18 AM	H2 valve closed
5/17/2010	10:14:18 AM	BCl3 valve closed
5/17/2010	10:14:18 AM	PH3 valve closed
5/17/2010	10:14:18 AM	SiCl4 pre valve closed
5/17/2010	10:14:18 AM	SiCl4 post valve closed
5/17/2010	10:14:18 AM	Main Vac valve closed
5/17/2010	10:14:18 AM	Bypass valve closed
5/17/2010	10:14:18 AM	Bubbler valve closed
5/17/2010	10:14:18 AM	Helium valve opened
5/17/2010	10:14:18 AM	Helium MFC set to  500.000000
5/17/2010	10:14:18 AM	H2 MFC set to  0.000000
5/17/2010	10:14:18 AM	BCl3 MFC set to  0.000000
5/17/2010	10:14:18 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:14:18 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:14:18 AM	Tube furnace set to 0
5/17/2010	10:14:30 AM	Helium valve closed
5/17/2010	10:14:30 AM	H2 valve closed
5/17/2010	10:14:30 AM	BCl3 valve closed
5/17/2010	10:14:30 AM	PH3 valve closed
5/17/2010	10:14:30 AM	SiCl4 pre valve closed
5/17/2010	10:14:30 AM	SiCl4 post valve closed
5/17/2010	10:14:30 AM	Main Vac valve closed
5/17/2010	10:14:30 AM	Bypass valve closed
5/17/2010	10:14:30 AM	Bubbler valve closed
5/17/2010	10:14:30 AM	Helium MFC set to  0.000000
5/17/2010	10:14:30 AM	H2 MFC set to  0.000000
5/17/2010	10:14:30 AM	BCl3 MFC set to  0.000000
5/17/2010	10:14:30 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:14:30 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:14:30 AM	Tube furnace set to 0
5/17/2010	10:14:45 AM	Helium valve closed
5/17/2010	10:14:45 AM	H2 valve closed
5/17/2010	10:14:45 AM	BCl3 valve closed
5/17/2010	10:14:45 AM	PH3 valve closed
5/17/2010	10:14:45 AM	SiCl4 pre valve closed
5/17/2010	10:14:45 AM	SiCl4 post valve closed
5/17/2010	10:14:45 AM	Main Vac valve closed
5/17/2010	10:14:45 AM	Bubbler valve closed
5/17/2010	10:14:45 AM	Bypass valve opened
5/17/2010	10:14:45 AM	Helium MFC set to  0.000000
5/17/2010	10:14:45 AM	H2 MFC set to  0.000000
5/17/2010	10:14:45 AM	BCl3 MFC set to  0.000000
5/17/2010	10:14:45 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:14:45 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:14:45 AM	Tube furnace set to 0
5/17/2010	10:14:58 AM	Helium valve closed
5/17/2010	10:14:58 AM	H2 valve closed
5/17/2010	10:14:58 AM	BCl3 valve closed
5/17/2010	10:14:58 AM	PH3 valve closed
5/17/2010	10:14:58 AM	SiCl4 pre valve closed
5/17/2010	10:14:58 AM	SiCl4 post valve closed
5/17/2010	10:14:58 AM	Bubbler valve closed
5/17/2010	10:14:58 AM	Main Vac valve opened
5/17/2010	10:14:58 AM	Bypass valve opened
5/17/2010	10:14:58 AM	Helium MFC set to  0.000000
5/17/2010	10:14:58 AM	H2 MFC set to  0.000000
5/17/2010	10:14:58 AM	BCl3 MFC set to  0.000000
5/17/2010	10:14:58 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:14:58 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:14:58 AM	Tube furnace set to 0
5/17/2010	10:18:49 AM	H2 valve closed
5/17/2010	10:18:49 AM	BCl3 valve closed
5/17/2010	10:18:49 AM	PH3 valve closed
5/17/2010	10:18:49 AM	SiCl4 pre valve closed
5/17/2010	10:18:49 AM	SiCl4 post valve closed
5/17/2010	10:18:49 AM	Main Vac valve closed
5/17/2010	10:18:49 AM	Bypass valve closed
5/17/2010	10:18:49 AM	Bubbler valve closed
5/17/2010	10:18:49 AM	Helium valve opened
5/17/2010	10:18:49 AM	Helium MFC set to  500.000000
5/17/2010	10:18:49 AM	H2 MFC set to  0.000000
5/17/2010	10:18:49 AM	BCl3 MFC set to  0.000000
5/17/2010	10:18:49 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:18:49 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:18:50 AM	Tube furnace set to 0
5/17/2010	10:19:08 AM	Helium valve closed
5/17/2010	10:19:08 AM	H2 valve closed
5/17/2010	10:19:08 AM	BCl3 valve closed
5/17/2010	10:19:08 AM	PH3 valve closed
5/17/2010	10:19:08 AM	SiCl4 pre valve closed
5/17/2010	10:19:08 AM	SiCl4 post valve closed
5/17/2010	10:19:08 AM	Main Vac valve closed
5/17/2010	10:19:08 AM	Bypass valve closed
5/17/2010	10:19:08 AM	Bubbler valve closed
5/17/2010	10:19:08 AM	Helium MFC set to  0.000000
5/17/2010	10:19:08 AM	H2 MFC set to  0.000000
5/17/2010	10:19:08 AM	BCl3 MFC set to  0.000000
5/17/2010	10:19:08 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:19:08 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:19:08 AM	Tube furnace set to 0
5/17/2010	10:19:23 AM	Helium valve closed
5/17/2010	10:19:23 AM	H2 valve closed
5/17/2010	10:19:23 AM	BCl3 valve closed
5/17/2010	10:19:23 AM	PH3 valve closed
5/17/2010	10:19:23 AM	SiCl4 pre valve closed
5/17/2010	10:19:23 AM	SiCl4 post valve closed
5/17/2010	10:19:23 AM	Main Vac valve closed
5/17/2010	10:19:23 AM	Bubbler valve closed
5/17/2010	10:19:23 AM	Bypass valve opened
5/17/2010	10:19:23 AM	Helium MFC set to  0.000000
5/17/2010	10:19:23 AM	H2 MFC set to  0.000000
5/17/2010	10:19:23 AM	BCl3 MFC set to  0.000000
5/17/2010	10:19:23 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:19:23 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:19:23 AM	Tube furnace set to 0
5/17/2010	10:19:42 AM	Helium valve closed
5/17/2010	10:19:42 AM	H2 valve closed
5/17/2010	10:19:42 AM	BCl3 valve closed
5/17/2010	10:19:43 AM	PH3 valve closed
5/17/2010	10:19:43 AM	SiCl4 pre valve closed
5/17/2010	10:19:43 AM	SiCl4 post valve closed
5/17/2010	10:19:43 AM	Bubbler valve closed
5/17/2010	10:19:43 AM	Main Vac valve opened
5/17/2010	10:19:43 AM	Bypass valve opened
5/17/2010	10:19:43 AM	Helium MFC set to  0.000000
5/17/2010	10:19:43 AM	H2 MFC set to  0.000000
5/17/2010	10:19:43 AM	BCl3 MFC set to  0.000000
5/17/2010	10:19:43 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:19:43 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:19:43 AM	Tube furnace set to 0
5/17/2010	10:21:02 AM	Run aborted at 10:21 AM
5/17/2010	10:21:02 AM	Helium valve closed
5/17/2010	10:21:02 AM	H2 valve closed
5/17/2010	10:21:02 AM	BCl3 valve closed
5/17/2010	10:21:02 AM	PH3 valve closed
5/17/2010	10:21:02 AM	SiCl4 pre valve closed
5/17/2010	10:21:02 AM	SiCl4 post valve closed
5/17/2010	10:21:02 AM	Bypass valve closed
5/17/2010	10:21:02 AM	Main Vac valve closed
5/17/2010	10:21:02 AM	Bubbler valve closed
5/17/2010	10:21:02 AM	Helium MFC set to  0.000000
5/17/2010	10:21:02 AM	H2 MFC set to  0.000000
5/17/2010	10:21:02 AM	BCl3 MFC set to  0.000000
5/17/2010	10:21:02 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:21:02 AM	Tube furnace set to 0
5/17/2010	10:21:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	10:21:19 AM	Bypass valve closed
5/17/2010	10:21:21 AM	Bypass valve opened
5/17/2010	10:21:23 AM	Main Vac valve closed
5/17/2010	10:21:26 AM	Main Vac valve opened
5/17/2010	10:24:02 AM	Recipe started at 10:24 AM
5/17/2010	10:24:02 AM	Helium valve closed
5/17/2010	10:24:02 AM	BCl3 valve closed
5/17/2010	10:24:02 AM	PH3 valve closed
5/17/2010	10:24:02 AM	SiCl4 pre valve closed
5/17/2010	10:24:02 AM	SiCl4 post valve closed
5/17/2010	10:24:02 AM	Main Vac valve closed
5/17/2010	10:24:02 AM	Bypass valve closed
5/17/2010	10:24:02 AM	Bubbler valve closed
5/17/2010	10:24:02 AM	H2 valve opened
5/17/2010	10:24:02 AM	Helium MFC set to  0.000000
5/17/2010	10:24:02 AM	H2 MFC set to  500.000000
5/17/2010	10:24:02 AM	BCl3 MFC set to  0.000000
5/17/2010	10:24:02 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:24:02 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:24:02 AM	Tube furnace set to 0
5/17/2010	10:25:25 AM	Helium valve closed
5/17/2010	10:25:25 AM	BCl3 valve closed
5/17/2010	10:25:25 AM	PH3 valve closed
5/17/2010	10:25:25 AM	SiCl4 pre valve closed
5/17/2010	10:25:25 AM	SiCl4 post valve closed
5/17/2010	10:25:25 AM	Main Vac valve closed
5/17/2010	10:25:25 AM	Bypass valve closed
5/17/2010	10:25:25 AM	H2 valve opened
5/17/2010	10:25:25 AM	Bubbler valve opened
5/17/2010	10:25:25 AM	Helium MFC set to  0.000000
5/17/2010	10:25:25 AM	H2 MFC set to  500.000000
5/17/2010	10:25:25 AM	BCl3 MFC set to  0.000000
5/17/2010	10:25:25 AM	SiCl4 MFC set to  0.000000
5/17/2010	10:25:26 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:25:26 AM	Tube furnace set to 1000
5/17/2010	10:47:26 AM	Helium valve closed
5/17/2010	10:47:26 AM	PH3 valve closed
5/17/2010	10:47:26 AM	Main Vac valve closed
5/17/2010	10:47:26 AM	Bypass valve closed
5/17/2010	10:47:26 AM	H2 valve opened
5/17/2010	10:47:26 AM	BCl3 valve opened
5/17/2010	10:47:26 AM	SiCl4 pre valve opened
5/17/2010	10:47:26 AM	SiCl4 post valve opened
5/17/2010	10:47:26 AM	Bubbler valve opened
5/17/2010	10:47:26 AM	Helium MFC set to  0.000000
5/17/2010	10:47:26 AM	H2 MFC set to  475.000000
5/17/2010	10:47:26 AM	BCl3 MFC set to  35.000000
5/17/2010	10:47:26 AM	SiCl4 MFC set to  350.000000
5/17/2010	10:47:26 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	10:47:26 AM	Tube furnace set to 1000
5/17/2010	11:02:26 AM	H2 valve closed
5/17/2010	11:02:26 AM	BCl3 valve closed
5/17/2010	11:02:26 AM	PH3 valve closed
5/17/2010	11:02:26 AM	SiCl4 pre valve closed
5/17/2010	11:02:26 AM	SiCl4 post valve closed
5/17/2010	11:02:26 AM	Main Vac valve closed
5/17/2010	11:02:26 AM	Bypass valve closed
5/17/2010	11:02:26 AM	Helium valve opened
5/17/2010	11:02:26 AM	Bubbler valve opened
5/17/2010	11:02:26 AM	Helium MFC set to  400.000000
5/17/2010	11:02:26 AM	H2 MFC set to  0.000000
5/17/2010	11:02:26 AM	BCl3 MFC set to  0.000000
5/17/2010	11:02:26 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:02:26 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:02:26 AM	Tube furnace set to 0
5/17/2010	11:22:26 AM	Helium valve closed
5/17/2010	11:22:26 AM	H2 valve closed
5/17/2010	11:22:26 AM	BCl3 valve closed
5/17/2010	11:22:26 AM	PH3 valve closed
5/17/2010	11:22:26 AM	SiCl4 pre valve closed
5/17/2010	11:22:26 AM	SiCl4 post valve closed
5/17/2010	11:22:26 AM	Main Vac valve closed
5/17/2010	11:22:26 AM	Bypass valve closed
5/17/2010	11:22:26 AM	Bubbler valve closed
5/17/2010	11:22:26 AM	Helium MFC set to  0.000000
5/17/2010	11:22:26 AM	H2 MFC set to  0.000000
5/17/2010	11:22:26 AM	BCl3 MFC set to  0.000000
5/17/2010	11:22:26 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:22:26 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:22:26 AM	Tube furnace set to 0
5/17/2010	11:22:26 AM	Run finished at 11:22 AM
5/17/2010	11:28:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	11:28:30 AM	Recipe started at 11:28 AM
5/17/2010	11:28:30 AM	Helium valve closed
5/17/2010	11:28:30 AM	H2 valve closed
5/17/2010	11:28:30 AM	BCl3 valve closed
5/17/2010	11:28:30 AM	PH3 valve closed
5/17/2010	11:28:30 AM	SiCl4 pre valve closed
5/17/2010	11:28:30 AM	SiCl4 post valve closed
5/17/2010	11:28:30 AM	Main Vac valve closed
5/17/2010	11:28:30 AM	Bubbler valve closed
5/17/2010	11:28:30 AM	Bypass valve opened
5/17/2010	11:28:30 AM	Helium MFC set to  0.000000
5/17/2010	11:28:30 AM	H2 MFC set to  0.000000
5/17/2010	11:28:30 AM	BCl3 MFC set to  0.000000
5/17/2010	11:28:30 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:28:30 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:28:30 AM	Tube furnace set to 0
5/17/2010	11:29:15 AM	Helium valve closed
5/17/2010	11:29:15 AM	H2 valve closed
5/17/2010	11:29:15 AM	BCl3 valve closed
5/17/2010	11:29:15 AM	PH3 valve closed
5/17/2010	11:29:15 AM	SiCl4 pre valve closed
5/17/2010	11:29:15 AM	SiCl4 post valve closed
5/17/2010	11:29:15 AM	Bubbler valve closed
5/17/2010	11:29:15 AM	Main Vac valve opened
5/17/2010	11:29:15 AM	Bypass valve opened
5/17/2010	11:29:15 AM	Helium MFC set to  0.000000
5/17/2010	11:29:15 AM	H2 MFC set to  0.000000
5/17/2010	11:29:15 AM	BCl3 MFC set to  0.000000
5/17/2010	11:29:15 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:29:15 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:29:15 AM	Tube furnace set to 0
5/17/2010	11:29:16 AM	Run finished at 11:29 AM
5/17/2010	11:29:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	11:40:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	11:40:49 AM	Recipe started at 11:40 AM
5/17/2010	11:40:49 AM	H2 valve closed
5/17/2010	11:40:49 AM	BCl3 valve closed
5/17/2010	11:40:49 AM	PH3 valve closed
5/17/2010	11:40:49 AM	SiCl4 pre valve closed
5/17/2010	11:40:49 AM	SiCl4 post valve closed
5/17/2010	11:40:49 AM	Main Vac valve closed
5/17/2010	11:40:49 AM	Bypass valve closed
5/17/2010	11:40:49 AM	Bubbler valve closed
5/17/2010	11:40:49 AM	Helium valve opened
5/17/2010	11:40:49 AM	Helium MFC set to  500.000000
5/17/2010	11:40:49 AM	H2 MFC set to  0.000000
5/17/2010	11:40:49 AM	BCl3 MFC set to  0.000000
5/17/2010	11:40:49 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:40:49 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:40:49 AM	Tube furnace set to 0
5/17/2010	11:42:01 AM	Helium valve closed
5/17/2010	11:42:01 AM	H2 valve closed
5/17/2010	11:42:01 AM	BCl3 valve closed
5/17/2010	11:42:01 AM	PH3 valve closed
5/17/2010	11:42:01 AM	SiCl4 pre valve closed
5/17/2010	11:42:01 AM	SiCl4 post valve closed
5/17/2010	11:42:01 AM	Main Vac valve closed
5/17/2010	11:42:01 AM	Bypass valve closed
5/17/2010	11:42:01 AM	Bubbler valve closed
5/17/2010	11:42:01 AM	Helium MFC set to  0.000000
5/17/2010	11:42:01 AM	H2 MFC set to  0.000000
5/17/2010	11:42:01 AM	BCl3 MFC set to  0.000000
5/17/2010	11:42:01 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:42:01 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:42:01 AM	Tube furnace set to 0
5/17/2010	11:42:16 AM	Helium valve closed
5/17/2010	11:42:16 AM	H2 valve closed
5/17/2010	11:42:16 AM	BCl3 valve closed
5/17/2010	11:42:16 AM	PH3 valve closed
5/17/2010	11:42:16 AM	SiCl4 pre valve closed
5/17/2010	11:42:16 AM	SiCl4 post valve closed
5/17/2010	11:42:16 AM	Main Vac valve closed
5/17/2010	11:42:16 AM	Bubbler valve closed
5/17/2010	11:42:16 AM	Bypass valve opened
5/17/2010	11:42:16 AM	Helium MFC set to  0.000000
5/17/2010	11:42:16 AM	H2 MFC set to  0.000000
5/17/2010	11:42:16 AM	BCl3 MFC set to  0.000000
5/17/2010	11:42:16 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:42:16 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:42:16 AM	Tube furnace set to 0
5/17/2010	11:42:47 AM	Helium valve closed
5/17/2010	11:42:47 AM	H2 valve closed
5/17/2010	11:42:47 AM	BCl3 valve closed
5/17/2010	11:42:47 AM	PH3 valve closed
5/17/2010	11:42:47 AM	SiCl4 pre valve closed
5/17/2010	11:42:47 AM	SiCl4 post valve closed
5/17/2010	11:42:47 AM	Bubbler valve closed
5/17/2010	11:42:47 AM	Main Vac valve opened
5/17/2010	11:42:47 AM	Bypass valve opened
5/17/2010	11:42:47 AM	Helium MFC set to  0.000000
5/17/2010	11:42:47 AM	H2 MFC set to  0.000000
5/17/2010	11:42:47 AM	BCl3 MFC set to  0.000000
5/17/2010	11:42:47 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:42:47 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:42:47 AM	Tube furnace set to 0
5/17/2010	11:45:17 AM	H2 valve closed
5/17/2010	11:45:17 AM	BCl3 valve closed
5/17/2010	11:45:17 AM	PH3 valve closed
5/17/2010	11:45:17 AM	SiCl4 pre valve closed
5/17/2010	11:45:17 AM	SiCl4 post valve closed
5/17/2010	11:45:17 AM	Main Vac valve closed
5/17/2010	11:45:17 AM	Bypass valve closed
5/17/2010	11:45:17 AM	Bubbler valve closed
5/17/2010	11:45:17 AM	Helium valve opened
5/17/2010	11:45:17 AM	Helium MFC set to  500.000000
5/17/2010	11:45:17 AM	H2 MFC set to  0.000000
5/17/2010	11:45:17 AM	BCl3 MFC set to  0.000000
5/17/2010	11:45:17 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:45:17 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:45:17 AM	Tube furnace set to 0
5/17/2010	11:45:43 AM	Helium valve closed
5/17/2010	11:45:43 AM	H2 valve closed
5/17/2010	11:45:43 AM	BCl3 valve closed
5/17/2010	11:45:43 AM	PH3 valve closed
5/17/2010	11:45:43 AM	SiCl4 pre valve closed
5/17/2010	11:45:43 AM	SiCl4 post valve closed
5/17/2010	11:45:43 AM	Main Vac valve closed
5/17/2010	11:45:43 AM	Bypass valve closed
5/17/2010	11:45:43 AM	Bubbler valve closed
5/17/2010	11:45:43 AM	Helium MFC set to  0.000000
5/17/2010	11:45:43 AM	H2 MFC set to  0.000000
5/17/2010	11:45:43 AM	BCl3 MFC set to  0.000000
5/17/2010	11:45:43 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:45:43 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:45:44 AM	Tube furnace set to 0
5/17/2010	11:45:59 AM	Helium valve closed
5/17/2010	11:45:59 AM	H2 valve closed
5/17/2010	11:45:59 AM	BCl3 valve closed
5/17/2010	11:45:59 AM	PH3 valve closed
5/17/2010	11:45:59 AM	SiCl4 pre valve closed
5/17/2010	11:45:59 AM	SiCl4 post valve closed
5/17/2010	11:45:59 AM	Main Vac valve closed
5/17/2010	11:45:59 AM	Bubbler valve closed
5/17/2010	11:45:59 AM	Bypass valve opened
5/17/2010	11:45:59 AM	Helium MFC set to  0.000000
5/17/2010	11:45:59 AM	H2 MFC set to  0.000000
5/17/2010	11:45:59 AM	BCl3 MFC set to  0.000000
5/17/2010	11:45:59 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:45:59 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:45:59 AM	Tube furnace set to 0
5/17/2010	11:46:22 AM	Helium valve closed
5/17/2010	11:46:22 AM	H2 valve closed
5/17/2010	11:46:22 AM	BCl3 valve closed
5/17/2010	11:46:22 AM	PH3 valve closed
5/17/2010	11:46:22 AM	SiCl4 pre valve closed
5/17/2010	11:46:22 AM	SiCl4 post valve closed
5/17/2010	11:46:22 AM	Bubbler valve closed
5/17/2010	11:46:22 AM	Main Vac valve opened
5/17/2010	11:46:22 AM	Bypass valve opened
5/17/2010	11:46:22 AM	Helium MFC set to  0.000000
5/17/2010	11:46:22 AM	H2 MFC set to  0.000000
5/17/2010	11:46:22 AM	BCl3 MFC set to  0.000000
5/17/2010	11:46:22 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:46:22 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:46:22 AM	Tube furnace set to 0
5/17/2010	11:48:04 AM	H2 valve closed
5/17/2010	11:48:04 AM	BCl3 valve closed
5/17/2010	11:48:04 AM	PH3 valve closed
5/17/2010	11:48:04 AM	SiCl4 pre valve closed
5/17/2010	11:48:04 AM	SiCl4 post valve closed
5/17/2010	11:48:04 AM	Main Vac valve closed
5/17/2010	11:48:04 AM	Bypass valve closed
5/17/2010	11:48:04 AM	Bubbler valve closed
5/17/2010	11:48:04 AM	Helium valve opened
5/17/2010	11:48:04 AM	Helium MFC set to  500.000000
5/17/2010	11:48:04 AM	H2 MFC set to  0.000000
5/17/2010	11:48:04 AM	BCl3 MFC set to  0.000000
5/17/2010	11:48:04 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:48:04 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:48:04 AM	Tube furnace set to 0
5/17/2010	11:48:28 AM	Helium valve closed
5/17/2010	11:48:29 AM	H2 valve closed
5/17/2010	11:48:29 AM	BCl3 valve closed
5/17/2010	11:48:29 AM	PH3 valve closed
5/17/2010	11:48:29 AM	SiCl4 pre valve closed
5/17/2010	11:48:29 AM	SiCl4 post valve closed
5/17/2010	11:48:29 AM	Main Vac valve closed
5/17/2010	11:48:29 AM	Bypass valve closed
5/17/2010	11:48:29 AM	Bubbler valve closed
5/17/2010	11:48:29 AM	Helium MFC set to  0.000000
5/17/2010	11:48:29 AM	H2 MFC set to  0.000000
5/17/2010	11:48:29 AM	BCl3 MFC set to  0.000000
5/17/2010	11:48:29 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:48:29 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:48:29 AM	Tube furnace set to 0
5/17/2010	11:48:44 AM	Helium valve closed
5/17/2010	11:48:44 AM	H2 valve closed
5/17/2010	11:48:44 AM	BCl3 valve closed
5/17/2010	11:48:44 AM	PH3 valve closed
5/17/2010	11:48:44 AM	SiCl4 pre valve closed
5/17/2010	11:48:44 AM	SiCl4 post valve closed
5/17/2010	11:48:44 AM	Main Vac valve closed
5/17/2010	11:48:44 AM	Bubbler valve closed
5/17/2010	11:48:44 AM	Bypass valve opened
5/17/2010	11:48:44 AM	Helium MFC set to  0.000000
5/17/2010	11:48:44 AM	H2 MFC set to  0.000000
5/17/2010	11:48:44 AM	BCl3 MFC set to  0.000000
5/17/2010	11:48:44 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:48:44 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:48:44 AM	Tube furnace set to 0
5/17/2010	11:49:06 AM	Helium valve closed
5/17/2010	11:49:06 AM	H2 valve closed
5/17/2010	11:49:06 AM	BCl3 valve closed
5/17/2010	11:49:06 AM	PH3 valve closed
5/17/2010	11:49:06 AM	SiCl4 pre valve closed
5/17/2010	11:49:06 AM	SiCl4 post valve closed
5/17/2010	11:49:06 AM	Bubbler valve closed
5/17/2010	11:49:06 AM	Main Vac valve opened
5/17/2010	11:49:06 AM	Bypass valve opened
5/17/2010	11:49:06 AM	Helium MFC set to  0.000000
5/17/2010	11:49:06 AM	H2 MFC set to  0.000000
5/17/2010	11:49:06 AM	BCl3 MFC set to  0.000000
5/17/2010	11:49:06 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:49:06 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:49:06 AM	Tube furnace set to 0
5/17/2010	11:54:06 AM	Helium valve closed
5/17/2010	11:54:06 AM	H2 valve closed
5/17/2010	11:54:06 AM	BCl3 valve closed
5/17/2010	11:54:06 AM	PH3 valve closed
5/17/2010	11:54:06 AM	SiCl4 pre valve closed
5/17/2010	11:54:06 AM	SiCl4 post valve closed
5/17/2010	11:54:06 AM	Bubbler valve closed
5/17/2010	11:54:06 AM	Main Vac valve opened
5/17/2010	11:54:06 AM	Bypass valve opened
5/17/2010	11:54:06 AM	Helium MFC set to  0.000000
5/17/2010	11:54:06 AM	H2 MFC set to  0.000000
5/17/2010	11:54:06 AM	BCl3 MFC set to  0.000000
5/17/2010	11:54:06 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:54:06 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:54:06 AM	Tube furnace set to 0
5/17/2010	11:54:07 AM	Run finished at 11:54 AM
5/17/2010	11:54:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	11:54:44 AM	Main Vac valve closed
5/17/2010	11:54:46 AM	Bypass valve closed
5/17/2010	11:55:01 AM	Bypass valve opened
5/17/2010	11:55:02 AM	Main Vac valve opened
5/17/2010	11:56:34 AM	Recipe started at 11:56 AM
5/17/2010	11:56:34 AM	Helium valve closed
5/17/2010	11:56:34 AM	BCl3 valve closed
5/17/2010	11:56:34 AM	PH3 valve closed
5/17/2010	11:56:34 AM	SiCl4 pre valve closed
5/17/2010	11:56:34 AM	SiCl4 post valve closed
5/17/2010	11:56:34 AM	Main Vac valve closed
5/17/2010	11:56:34 AM	Bypass valve closed
5/17/2010	11:56:34 AM	Bubbler valve closed
5/17/2010	11:56:34 AM	H2 valve opened
5/17/2010	11:56:34 AM	Helium MFC set to  0.000000
5/17/2010	11:56:34 AM	H2 MFC set to  500.000000
5/17/2010	11:56:34 AM	BCl3 MFC set to  0.000000
5/17/2010	11:56:34 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:56:34 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:56:34 AM	Tube furnace set to 0
5/17/2010	11:57:56 AM	Helium valve closed
5/17/2010	11:57:56 AM	BCl3 valve closed
5/17/2010	11:57:56 AM	PH3 valve closed
5/17/2010	11:57:56 AM	SiCl4 pre valve closed
5/17/2010	11:57:56 AM	SiCl4 post valve closed
5/17/2010	11:57:56 AM	Main Vac valve closed
5/17/2010	11:57:56 AM	Bypass valve closed
5/17/2010	11:57:56 AM	H2 valve opened
5/17/2010	11:57:56 AM	Bubbler valve opened
5/17/2010	11:57:56 AM	Helium MFC set to  0.000000
5/17/2010	11:57:56 AM	H2 MFC set to  500.000000
5/17/2010	11:57:56 AM	BCl3 MFC set to  0.000000
5/17/2010	11:57:56 AM	SiCl4 MFC set to  0.000000
5/17/2010	11:57:56 AM	Bypass solenoid MFC set to  0.000000
5/17/2010	11:57:56 AM	Tube furnace set to 1000
5/17/2010	12:19:56 PM	Helium valve closed
5/17/2010	12:19:56 PM	PH3 valve closed
5/17/2010	12:19:56 PM	Main Vac valve closed
5/17/2010	12:19:56 PM	Bypass valve closed
5/17/2010	12:19:56 PM	H2 valve opened
5/17/2010	12:19:56 PM	BCl3 valve opened
5/17/2010	12:19:56 PM	SiCl4 pre valve opened
5/17/2010	12:19:56 PM	SiCl4 post valve opened
5/17/2010	12:19:56 PM	Bubbler valve opened
5/17/2010	12:19:56 PM	Helium MFC set to  0.000000
5/17/2010	12:19:56 PM	H2 MFC set to  500.000000
5/17/2010	12:19:56 PM	BCl3 MFC set to  35.000000
5/17/2010	12:19:56 PM	SiCl4 MFC set to  350.000000
5/17/2010	12:19:56 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	12:19:56 PM	Tube furnace set to 1000
5/17/2010	12:39:56 PM	H2 valve closed
5/17/2010	12:39:56 PM	BCl3 valve closed
5/17/2010	12:39:56 PM	PH3 valve closed
5/17/2010	12:39:56 PM	SiCl4 pre valve closed
5/17/2010	12:39:56 PM	SiCl4 post valve closed
5/17/2010	12:39:56 PM	Main Vac valve closed
5/17/2010	12:39:56 PM	Bypass valve closed
5/17/2010	12:39:56 PM	Helium valve opened
5/17/2010	12:39:56 PM	Bubbler valve opened
5/17/2010	12:39:56 PM	Helium MFC set to  400.000000
5/17/2010	12:39:56 PM	H2 MFC set to  0.000000
5/17/2010	12:39:56 PM	BCl3 MFC set to  0.000000
5/17/2010	12:39:56 PM	SiCl4 MFC set to  0.000000
5/17/2010	12:39:56 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	12:39:56 PM	Tube furnace set to 0
5/17/2010	12:59:56 PM	Helium valve closed
5/17/2010	12:59:56 PM	H2 valve closed
5/17/2010	12:59:56 PM	BCl3 valve closed
5/17/2010	12:59:56 PM	PH3 valve closed
5/17/2010	12:59:56 PM	SiCl4 pre valve closed
5/17/2010	12:59:56 PM	SiCl4 post valve closed
5/17/2010	12:59:56 PM	Main Vac valve closed
5/17/2010	12:59:56 PM	Bypass valve closed
5/17/2010	12:59:56 PM	Bubbler valve closed
5/17/2010	12:59:56 PM	Helium MFC set to  0.000000
5/17/2010	12:59:56 PM	H2 MFC set to  0.000000
5/17/2010	12:59:56 PM	BCl3 MFC set to  0.000000
5/17/2010	12:59:56 PM	SiCl4 MFC set to  0.000000
5/17/2010	12:59:56 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	12:59:56 PM	Tube furnace set to 0
5/17/2010	12:59:57 PM	Run finished at 12:59 PM
5/17/2010	1:12:48 PM	Helium MFC set to  400.000000
5/17/2010	1:12:49 PM	Helium valve opened
5/17/2010	1:12:52 PM	Bubbler valve opened
5/17/2010	1:18:07 PM	Helium MFC set to  400.000000
5/17/2010	1:18:11 PM	Bubbler valve closed
5/17/2010	1:18:14 PM	Helium MFC set to  0.000000
5/17/2010	1:18:15 PM	Helium valve closed
5/17/2010	1:23:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	1:23:09 PM	Recipe started at 1:23 PM
5/17/2010	1:23:09 PM	Helium valve closed
5/17/2010	1:23:09 PM	H2 valve closed
5/17/2010	1:23:09 PM	BCl3 valve closed
5/17/2010	1:23:09 PM	PH3 valve closed
5/17/2010	1:23:09 PM	SiCl4 pre valve closed
5/17/2010	1:23:09 PM	SiCl4 post valve closed
5/17/2010	1:23:09 PM	Main Vac valve closed
5/17/2010	1:23:09 PM	Bubbler valve closed
5/17/2010	1:23:09 PM	Bypass valve opened
5/17/2010	1:23:09 PM	Helium MFC set to  0.000000
5/17/2010	1:23:09 PM	H2 MFC set to  0.000000
5/17/2010	1:23:09 PM	BCl3 MFC set to  0.000000
5/17/2010	1:23:09 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:23:09 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:23:10 PM	Tube furnace set to 0
5/17/2010	1:23:55 PM	Helium valve closed
5/17/2010	1:23:55 PM	H2 valve closed
5/17/2010	1:23:55 PM	BCl3 valve closed
5/17/2010	1:23:55 PM	PH3 valve closed
5/17/2010	1:23:55 PM	SiCl4 pre valve closed
5/17/2010	1:23:55 PM	SiCl4 post valve closed
5/17/2010	1:23:55 PM	Bubbler valve closed
5/17/2010	1:23:55 PM	Main Vac valve opened
5/17/2010	1:23:55 PM	Bypass valve opened
5/17/2010	1:23:55 PM	Helium MFC set to  0.000000
5/17/2010	1:23:55 PM	H2 MFC set to  0.000000
5/17/2010	1:23:55 PM	BCl3 MFC set to  0.000000
5/17/2010	1:23:55 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:23:55 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:23:56 PM	Tube furnace set to 0
5/17/2010	1:23:56 PM	Run finished at 1:23 PM
5/17/2010	1:23:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	1:25:34 PM	Recipe started at 1:25 PM
5/17/2010	1:25:34 PM	Helium valve closed
5/17/2010	1:25:34 PM	H2 valve closed
5/17/2010	1:25:34 PM	BCl3 valve closed
5/17/2010	1:25:34 PM	PH3 valve closed
5/17/2010	1:25:34 PM	SiCl4 pre valve closed
5/17/2010	1:25:34 PM	SiCl4 post valve closed
5/17/2010	1:25:34 PM	Main Vac valve closed
5/17/2010	1:25:34 PM	Bubbler valve closed
5/17/2010	1:25:34 PM	Bypass valve opened
5/17/2010	1:25:34 PM	Helium MFC set to  0.000000
5/17/2010	1:25:34 PM	H2 MFC set to  0.000000
5/17/2010	1:25:34 PM	BCl3 MFC set to  0.000000
5/17/2010	1:25:34 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:25:34 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:25:34 PM	Tube furnace set to 0
5/17/2010	1:25:35 PM	Helium valve closed
5/17/2010	1:25:35 PM	H2 valve closed
5/17/2010	1:25:35 PM	BCl3 valve closed
5/17/2010	1:25:35 PM	PH3 valve closed
5/17/2010	1:25:35 PM	SiCl4 pre valve closed
5/17/2010	1:25:35 PM	SiCl4 post valve closed
5/17/2010	1:25:35 PM	Bubbler valve closed
5/17/2010	1:25:35 PM	Main Vac valve opened
5/17/2010	1:25:35 PM	Bypass valve opened
5/17/2010	1:25:35 PM	Helium MFC set to  0.000000
5/17/2010	1:25:35 PM	H2 MFC set to  0.000000
5/17/2010	1:25:35 PM	BCl3 MFC set to  0.000000
5/17/2010	1:25:35 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:25:35 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:25:35 PM	Tube furnace set to 0
5/17/2010	1:25:57 PM	H2 valve closed
5/17/2010	1:25:57 PM	BCl3 valve closed
5/17/2010	1:25:57 PM	PH3 valve closed
5/17/2010	1:25:57 PM	SiCl4 pre valve closed
5/17/2010	1:25:57 PM	SiCl4 post valve closed
5/17/2010	1:25:57 PM	Bubbler valve closed
5/17/2010	1:25:57 PM	Helium valve opened
5/17/2010	1:25:57 PM	Main Vac valve opened
5/17/2010	1:25:57 PM	Bypass valve opened
5/17/2010	1:25:57 PM	Helium MFC set to  100.000000
5/17/2010	1:25:57 PM	H2 MFC set to  0.000000
5/17/2010	1:25:57 PM	BCl3 MFC set to  0.000000
5/17/2010	1:25:57 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:25:57 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:25:57 PM	Tube furnace set to 0
5/17/2010	1:27:57 PM	Helium valve closed
5/17/2010	1:27:57 PM	H2 valve closed
5/17/2010	1:27:57 PM	BCl3 valve closed
5/17/2010	1:27:57 PM	PH3 valve closed
5/17/2010	1:27:57 PM	SiCl4 pre valve closed
5/17/2010	1:27:57 PM	SiCl4 post valve closed
5/17/2010	1:27:57 PM	Bubbler valve closed
5/17/2010	1:27:57 PM	Main Vac valve opened
5/17/2010	1:27:57 PM	Bypass valve opened
5/17/2010	1:27:57 PM	Helium MFC set to  0.000000
5/17/2010	1:27:57 PM	H2 MFC set to  0.000000
5/17/2010	1:27:57 PM	BCl3 MFC set to  0.000000
5/17/2010	1:27:57 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:27:57 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:27:57 PM	Tube furnace set to 0
5/17/2010	1:32:57 PM	H2 valve closed
5/17/2010	1:32:57 PM	BCl3 valve closed
5/17/2010	1:32:57 PM	PH3 valve closed
5/17/2010	1:32:57 PM	SiCl4 pre valve closed
5/17/2010	1:32:57 PM	SiCl4 post valve closed
5/17/2010	1:32:57 PM	Bubbler valve closed
5/17/2010	1:32:57 PM	Helium valve opened
5/17/2010	1:32:57 PM	Main Vac valve opened
5/17/2010	1:32:57 PM	Bypass valve opened
5/17/2010	1:32:57 PM	Helium MFC set to  100.000000
5/17/2010	1:32:57 PM	H2 MFC set to  0.000000
5/17/2010	1:32:57 PM	BCl3 MFC set to  0.000000
5/17/2010	1:32:57 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:32:57 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:32:58 PM	Tube furnace set to 0
5/17/2010	1:34:58 PM	Helium valve closed
5/17/2010	1:34:58 PM	H2 valve closed
5/17/2010	1:34:58 PM	BCl3 valve closed
5/17/2010	1:34:58 PM	PH3 valve closed
5/17/2010	1:34:58 PM	SiCl4 pre valve closed
5/17/2010	1:34:58 PM	SiCl4 post valve closed
5/17/2010	1:34:58 PM	Bubbler valve closed
5/17/2010	1:34:58 PM	Main Vac valve opened
5/17/2010	1:34:58 PM	Bypass valve opened
5/17/2010	1:34:58 PM	Helium MFC set to  0.000000
5/17/2010	1:34:58 PM	H2 MFC set to  0.000000
5/17/2010	1:34:58 PM	BCl3 MFC set to  0.000000
5/17/2010	1:34:58 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:34:58 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:34:58 PM	Tube furnace set to 0
5/17/2010	1:35:32 PM	Run finished at 1:35 PM
5/17/2010	1:35:53 PM	Main Vac valve closed
5/17/2010	1:35:56 PM	Bypass valve closed
5/17/2010	1:36:12 PM	Bypass valve opened
5/17/2010	1:36:13 PM	Main Vac valve opened
5/17/2010	1:38:48 PM	Recipe started at 1:38 PM
5/17/2010	1:38:48 PM	Helium valve closed
5/17/2010	1:38:48 PM	BCl3 valve closed
5/17/2010	1:38:48 PM	PH3 valve closed
5/17/2010	1:38:48 PM	SiCl4 pre valve closed
5/17/2010	1:38:48 PM	SiCl4 post valve closed
5/17/2010	1:38:48 PM	Main Vac valve closed
5/17/2010	1:38:48 PM	Bypass valve closed
5/17/2010	1:38:48 PM	Bubbler valve closed
5/17/2010	1:38:48 PM	H2 valve opened
5/17/2010	1:38:48 PM	Helium MFC set to  0.000000
5/17/2010	1:38:48 PM	H2 MFC set to  500.000000
5/17/2010	1:38:48 PM	BCl3 MFC set to  0.000000
5/17/2010	1:38:48 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:38:48 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:38:48 PM	Tube furnace set to 0
5/17/2010	1:40:09 PM	Helium valve closed
5/17/2010	1:40:09 PM	BCl3 valve closed
5/17/2010	1:40:09 PM	PH3 valve closed
5/17/2010	1:40:09 PM	SiCl4 pre valve closed
5/17/2010	1:40:09 PM	SiCl4 post valve closed
5/17/2010	1:40:09 PM	Main Vac valve closed
5/17/2010	1:40:09 PM	Bypass valve closed
5/17/2010	1:40:09 PM	H2 valve opened
5/17/2010	1:40:09 PM	Bubbler valve opened
5/17/2010	1:40:09 PM	Helium MFC set to  0.000000
5/17/2010	1:40:09 PM	H2 MFC set to  400.000000
5/17/2010	1:40:09 PM	BCl3 MFC set to  0.000000
5/17/2010	1:40:09 PM	SiCl4 MFC set to  0.000000
5/17/2010	1:40:09 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	1:40:09 PM	Tube furnace set to 1000
5/17/2010	2:00:09 PM	Helium valve closed
5/17/2010	2:00:09 PM	PH3 valve closed
5/17/2010	2:00:09 PM	Main Vac valve closed
5/17/2010	2:00:09 PM	Bypass valve closed
5/17/2010	2:00:09 PM	H2 valve opened
5/17/2010	2:00:09 PM	BCl3 valve opened
5/17/2010	2:00:09 PM	SiCl4 pre valve opened
5/17/2010	2:00:09 PM	SiCl4 post valve opened
5/17/2010	2:00:09 PM	Bubbler valve opened
5/17/2010	2:00:09 PM	Helium MFC set to  0.000000
5/17/2010	2:00:09 PM	H2 MFC set to  475.000000
5/17/2010	2:00:09 PM	BCl3 MFC set to  35.000000
5/17/2010	2:00:09 PM	SiCl4 MFC set to  375.000000
5/17/2010	2:00:09 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:00:09 PM	Tube furnace set to 1000
5/17/2010	2:20:09 PM	H2 valve closed
5/17/2010	2:20:09 PM	BCl3 valve closed
5/17/2010	2:20:09 PM	PH3 valve closed
5/17/2010	2:20:09 PM	SiCl4 pre valve closed
5/17/2010	2:20:09 PM	SiCl4 post valve closed
5/17/2010	2:20:09 PM	Main Vac valve closed
5/17/2010	2:20:09 PM	Bypass valve closed
5/17/2010	2:20:09 PM	Helium valve opened
5/17/2010	2:20:09 PM	Bubbler valve opened
5/17/2010	2:20:09 PM	Helium MFC set to  400.000000
5/17/2010	2:20:09 PM	H2 MFC set to  0.000000
5/17/2010	2:20:09 PM	BCl3 MFC set to  0.000000
5/17/2010	2:20:09 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:20:09 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:20:10 PM	Tube furnace set to 0
5/17/2010	2:40:09 PM	Helium valve closed
5/17/2010	2:40:09 PM	H2 valve closed
5/17/2010	2:40:09 PM	BCl3 valve closed
5/17/2010	2:40:09 PM	PH3 valve closed
5/17/2010	2:40:09 PM	SiCl4 pre valve closed
5/17/2010	2:40:09 PM	SiCl4 post valve closed
5/17/2010	2:40:09 PM	Main Vac valve closed
5/17/2010	2:40:09 PM	Bypass valve closed
5/17/2010	2:40:10 PM	Bubbler valve closed
5/17/2010	2:40:10 PM	Helium MFC set to  0.000000
5/17/2010	2:40:10 PM	H2 MFC set to  0.000000
5/17/2010	2:40:10 PM	BCl3 MFC set to  0.000000
5/17/2010	2:40:10 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:40:10 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:40:10 PM	Tube furnace set to 0
5/17/2010	2:40:10 PM	Run finished at 2:40 PM
5/17/2010	2:46:53 PM	Helium MFC set to  200.000000
5/17/2010	2:46:55 PM	Helium valve opened
5/17/2010	2:47:04 PM	Bubbler valve opened
5/17/2010	2:47:13 PM	Helium MFC set to  500.000000
5/17/2010	2:47:29 PM	H2 MFC set to  200.000000
5/17/2010	2:47:30 PM	H2 valve opened
5/17/2010	2:47:40 PM	H2 MFC set to  400.000000
5/17/2010	2:47:56 PM	H2 MFC set to  500.000000
5/17/2010	2:48:29 PM	H2 MFC set to  0.000000
5/17/2010	2:48:30 PM	H2 valve closed
5/17/2010	2:48:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/17/2010	2:48:41 PM	Recipe started at 2:48 PM
5/17/2010	2:48:41 PM	Helium valve closed
5/17/2010	2:48:41 PM	H2 valve closed
5/17/2010	2:48:41 PM	BCl3 valve closed
5/17/2010	2:48:41 PM	PH3 valve closed
5/17/2010	2:48:42 PM	SiCl4 pre valve closed
5/17/2010	2:48:42 PM	SiCl4 post valve closed
5/17/2010	2:48:42 PM	Main Vac valve closed
5/17/2010	2:48:42 PM	Bypass valve closed
5/17/2010	2:48:42 PM	Bubbler valve closed
5/17/2010	2:48:42 PM	Helium MFC set to  0.000000
5/17/2010	2:48:42 PM	H2 MFC set to  0.000000
5/17/2010	2:48:42 PM	BCl3 MFC set to  0.000000
5/17/2010	2:48:42 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:48:42 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:48:42 PM	Tube furnace set to 0
5/17/2010	2:48:42 PM	Run finished at 2:48 PM
5/17/2010	2:48:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/17/2010	2:48:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	2:48:48 PM	Recipe started at 2:48 PM
5/17/2010	2:48:48 PM	Helium valve closed
5/17/2010	2:48:48 PM	H2 valve closed
5/17/2010	2:48:48 PM	BCl3 valve closed
5/17/2010	2:48:48 PM	PH3 valve closed
5/17/2010	2:48:48 PM	SiCl4 pre valve closed
5/17/2010	2:48:48 PM	SiCl4 post valve closed
5/17/2010	2:48:48 PM	Main Vac valve closed
5/17/2010	2:48:48 PM	Bubbler valve closed
5/17/2010	2:48:48 PM	Bypass valve opened
5/17/2010	2:48:48 PM	Helium MFC set to  0.000000
5/17/2010	2:48:48 PM	H2 MFC set to  0.000000
5/17/2010	2:48:49 PM	BCl3 MFC set to  0.000000
5/17/2010	2:48:49 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:48:49 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:48:49 PM	Tube furnace set to 0
5/17/2010	2:49:21 PM	Helium valve closed
5/17/2010	2:49:21 PM	H2 valve closed
5/17/2010	2:49:21 PM	BCl3 valve closed
5/17/2010	2:49:21 PM	PH3 valve closed
5/17/2010	2:49:21 PM	SiCl4 pre valve closed
5/17/2010	2:49:21 PM	SiCl4 post valve closed
5/17/2010	2:49:21 PM	Bubbler valve closed
5/17/2010	2:49:21 PM	Main Vac valve opened
5/17/2010	2:49:21 PM	Bypass valve opened
5/17/2010	2:49:21 PM	Helium MFC set to  0.000000
5/17/2010	2:49:21 PM	H2 MFC set to  0.000000
5/17/2010	2:49:21 PM	BCl3 MFC set to  0.000000
5/17/2010	2:49:21 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:49:21 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:49:21 PM	Tube furnace set to 0
5/17/2010	2:49:22 PM	Run finished at 2:49 PM
5/17/2010	2:49:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	2:57:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	2:57:59 PM	Recipe started at 2:57 PM
5/17/2010	2:57:59 PM	H2 valve closed
5/17/2010	2:57:59 PM	BCl3 valve closed
5/17/2010	2:57:59 PM	PH3 valve closed
5/17/2010	2:57:59 PM	SiCl4 pre valve closed
5/17/2010	2:57:59 PM	SiCl4 post valve closed
5/17/2010	2:57:59 PM	Main Vac valve closed
5/17/2010	2:57:59 PM	Bypass valve closed
5/17/2010	2:57:59 PM	Bubbler valve closed
5/17/2010	2:57:59 PM	Helium valve opened
5/17/2010	2:57:59 PM	Helium MFC set to  500.000000
5/17/2010	2:57:59 PM	H2 MFC set to  0.000000
5/17/2010	2:57:59 PM	BCl3 MFC set to  0.000000
5/17/2010	2:57:59 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:57:59 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:57:59 PM	Tube furnace set to 0
5/17/2010	2:59:18 PM	Helium valve closed
5/17/2010	2:59:18 PM	H2 valve closed
5/17/2010	2:59:18 PM	BCl3 valve closed
5/17/2010	2:59:18 PM	PH3 valve closed
5/17/2010	2:59:18 PM	SiCl4 pre valve closed
5/17/2010	2:59:18 PM	SiCl4 post valve closed
5/17/2010	2:59:18 PM	Main Vac valve closed
5/17/2010	2:59:18 PM	Bypass valve closed
5/17/2010	2:59:18 PM	Bubbler valve closed
5/17/2010	2:59:18 PM	Helium MFC set to  0.000000
5/17/2010	2:59:18 PM	H2 MFC set to  0.000000
5/17/2010	2:59:18 PM	BCl3 MFC set to  0.000000
5/17/2010	2:59:18 PM	SiCl4 MFC set to  0.000000
5/17/2010	2:59:18 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	2:59:18 PM	Tube furnace set to 0
5/17/2010	2:59:19 PM	Run finished at 2:59 PM
5/17/2010	2:59:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	3:02:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	3:02:24 PM	Recipe started at 3:02 PM
5/17/2010	3:02:24 PM	H2 valve closed
5/17/2010	3:02:24 PM	BCl3 valve closed
5/17/2010	3:02:24 PM	PH3 valve closed
5/17/2010	3:02:24 PM	SiCl4 pre valve closed
5/17/2010	3:02:24 PM	SiCl4 post valve closed
5/17/2010	3:02:24 PM	Main Vac valve closed
5/17/2010	3:02:24 PM	Bypass valve closed
5/17/2010	3:02:24 PM	Bubbler valve closed
5/17/2010	3:02:24 PM	Helium valve opened
5/17/2010	3:02:24 PM	Helium MFC set to  500.000000
5/17/2010	3:02:24 PM	H2 MFC set to  0.000000
5/17/2010	3:02:24 PM	BCl3 MFC set to  0.000000
5/17/2010	3:02:24 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:02:24 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:02:24 PM	Tube furnace set to 0
5/17/2010	3:02:26 PM	Helium valve closed
5/17/2010	3:02:26 PM	H2 valve closed
5/17/2010	3:02:26 PM	BCl3 valve closed
5/17/2010	3:02:26 PM	PH3 valve closed
5/17/2010	3:02:26 PM	SiCl4 pre valve closed
5/17/2010	3:02:26 PM	SiCl4 post valve closed
5/17/2010	3:02:26 PM	Main Vac valve closed
5/17/2010	3:02:26 PM	Bypass valve closed
5/17/2010	3:02:26 PM	Bubbler valve closed
5/17/2010	3:02:26 PM	Helium MFC set to  0.000000
5/17/2010	3:02:26 PM	H2 MFC set to  0.000000
5/17/2010	3:02:26 PM	BCl3 MFC set to  0.000000
5/17/2010	3:02:26 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:02:26 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:02:26 PM	Tube furnace set to 0
5/17/2010	3:02:41 PM	Helium valve closed
5/17/2010	3:02:41 PM	H2 valve closed
5/17/2010	3:02:41 PM	BCl3 valve closed
5/17/2010	3:02:41 PM	PH3 valve closed
5/17/2010	3:02:41 PM	SiCl4 pre valve closed
5/17/2010	3:02:41 PM	SiCl4 post valve closed
5/17/2010	3:02:41 PM	Main Vac valve closed
5/17/2010	3:02:41 PM	Bubbler valve closed
5/17/2010	3:02:41 PM	Bypass valve opened
5/17/2010	3:02:41 PM	Helium MFC set to  0.000000
5/17/2010	3:02:41 PM	H2 MFC set to  0.000000
5/17/2010	3:02:41 PM	BCl3 MFC set to  0.000000
5/17/2010	3:02:41 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:02:41 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:02:41 PM	Tube furnace set to 0
5/17/2010	3:03:25 PM	Helium valve closed
5/17/2010	3:03:25 PM	H2 valve closed
5/17/2010	3:03:25 PM	BCl3 valve closed
5/17/2010	3:03:25 PM	PH3 valve closed
5/17/2010	3:03:25 PM	SiCl4 pre valve closed
5/17/2010	3:03:25 PM	SiCl4 post valve closed
5/17/2010	3:03:25 PM	Bubbler valve closed
5/17/2010	3:03:25 PM	Main Vac valve opened
5/17/2010	3:03:25 PM	Bypass valve opened
5/17/2010	3:03:25 PM	Helium MFC set to  0.000000
5/17/2010	3:03:25 PM	H2 MFC set to  0.000000
5/17/2010	3:03:25 PM	BCl3 MFC set to  0.000000
5/17/2010	3:03:25 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:03:25 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:03:25 PM	Tube furnace set to 0
5/17/2010	3:08:25 PM	H2 valve closed
5/17/2010	3:08:25 PM	BCl3 valve closed
5/17/2010	3:08:25 PM	PH3 valve closed
5/17/2010	3:08:25 PM	SiCl4 pre valve closed
5/17/2010	3:08:25 PM	SiCl4 post valve closed
5/17/2010	3:08:25 PM	Main Vac valve closed
5/17/2010	3:08:25 PM	Bypass valve closed
5/17/2010	3:08:25 PM	Bubbler valve closed
5/17/2010	3:08:25 PM	Helium valve opened
5/17/2010	3:08:25 PM	Helium MFC set to  500.000000
5/17/2010	3:08:25 PM	H2 MFC set to  0.000000
5/17/2010	3:08:25 PM	BCl3 MFC set to  0.000000
5/17/2010	3:08:25 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:08:25 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:08:25 PM	Tube furnace set to 0
5/17/2010	3:09:45 PM	Helium valve closed
5/17/2010	3:09:45 PM	H2 valve closed
5/17/2010	3:09:45 PM	BCl3 valve closed
5/17/2010	3:09:45 PM	PH3 valve closed
5/17/2010	3:09:45 PM	SiCl4 pre valve closed
5/17/2010	3:09:45 PM	SiCl4 post valve closed
5/17/2010	3:09:45 PM	Main Vac valve closed
5/17/2010	3:09:45 PM	Bypass valve closed
5/17/2010	3:09:45 PM	Bubbler valve closed
5/17/2010	3:09:45 PM	Helium MFC set to  0.000000
5/17/2010	3:09:45 PM	H2 MFC set to  0.000000
5/17/2010	3:09:45 PM	BCl3 MFC set to  0.000000
5/17/2010	3:09:45 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:09:45 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:09:45 PM	Tube furnace set to 0
5/17/2010	3:10:00 PM	Helium valve closed
5/17/2010	3:10:00 PM	H2 valve closed
5/17/2010	3:10:00 PM	BCl3 valve closed
5/17/2010	3:10:00 PM	PH3 valve closed
5/17/2010	3:10:00 PM	SiCl4 pre valve closed
5/17/2010	3:10:00 PM	SiCl4 post valve closed
5/17/2010	3:10:00 PM	Main Vac valve closed
5/17/2010	3:10:00 PM	Bubbler valve closed
5/17/2010	3:10:00 PM	Bypass valve opened
5/17/2010	3:10:00 PM	Helium MFC set to  0.000000
5/17/2010	3:10:00 PM	H2 MFC set to  0.000000
5/17/2010	3:10:00 PM	BCl3 MFC set to  0.000000
5/17/2010	3:10:00 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:10:00 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:10:01 PM	Tube furnace set to 0
5/17/2010	3:10:32 PM	Helium valve closed
5/17/2010	3:10:32 PM	H2 valve closed
5/17/2010	3:10:32 PM	BCl3 valve closed
5/17/2010	3:10:32 PM	PH3 valve closed
5/17/2010	3:10:32 PM	SiCl4 pre valve closed
5/17/2010	3:10:32 PM	SiCl4 post valve closed
5/17/2010	3:10:32 PM	Bubbler valve closed
5/17/2010	3:10:32 PM	Main Vac valve opened
5/17/2010	3:10:32 PM	Bypass valve opened
5/17/2010	3:10:32 PM	Helium MFC set to  0.000000
5/17/2010	3:10:32 PM	H2 MFC set to  0.000000
5/17/2010	3:10:32 PM	BCl3 MFC set to  0.000000
5/17/2010	3:10:32 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:10:32 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:10:32 PM	Tube furnace set to 0
5/17/2010	3:13:18 PM	H2 valve closed
5/17/2010	3:13:18 PM	BCl3 valve closed
5/17/2010	3:13:18 PM	PH3 valve closed
5/17/2010	3:13:18 PM	SiCl4 pre valve closed
5/17/2010	3:13:18 PM	SiCl4 post valve closed
5/17/2010	3:13:18 PM	Main Vac valve closed
5/17/2010	3:13:18 PM	Bypass valve closed
5/17/2010	3:13:18 PM	Bubbler valve closed
5/17/2010	3:13:18 PM	Helium valve opened
5/17/2010	3:13:18 PM	Helium MFC set to  500.000000
5/17/2010	3:13:18 PM	H2 MFC set to  0.000000
5/17/2010	3:13:18 PM	BCl3 MFC set to  0.000000
5/17/2010	3:13:18 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:13:18 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:13:18 PM	Tube furnace set to 0
5/17/2010	3:13:41 PM	Helium valve closed
5/17/2010	3:13:41 PM	H2 valve closed
5/17/2010	3:13:41 PM	BCl3 valve closed
5/17/2010	3:13:41 PM	PH3 valve closed
5/17/2010	3:13:41 PM	SiCl4 pre valve closed
5/17/2010	3:13:41 PM	SiCl4 post valve closed
5/17/2010	3:13:41 PM	Main Vac valve closed
5/17/2010	3:13:41 PM	Bypass valve closed
5/17/2010	3:13:41 PM	Bubbler valve closed
5/17/2010	3:13:41 PM	Helium MFC set to  0.000000
5/17/2010	3:13:41 PM	H2 MFC set to  0.000000
5/17/2010	3:13:41 PM	BCl3 MFC set to  0.000000
5/17/2010	3:13:41 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:13:41 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:13:41 PM	Tube furnace set to 0
5/17/2010	3:13:56 PM	Helium valve closed
5/17/2010	3:13:56 PM	H2 valve closed
5/17/2010	3:13:56 PM	BCl3 valve closed
5/17/2010	3:13:56 PM	PH3 valve closed
5/17/2010	3:13:56 PM	SiCl4 pre valve closed
5/17/2010	3:13:56 PM	SiCl4 post valve closed
5/17/2010	3:13:56 PM	Main Vac valve closed
5/17/2010	3:13:56 PM	Bubbler valve closed
5/17/2010	3:13:56 PM	Bypass valve opened
5/17/2010	3:13:56 PM	Helium MFC set to  0.000000
5/17/2010	3:13:56 PM	H2 MFC set to  0.000000
5/17/2010	3:13:56 PM	BCl3 MFC set to  0.000000
5/17/2010	3:13:56 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:13:56 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:13:56 PM	Tube furnace set to 0
5/17/2010	3:14:18 PM	Helium valve closed
5/17/2010	3:14:18 PM	H2 valve closed
5/17/2010	3:14:18 PM	BCl3 valve closed
5/17/2010	3:14:18 PM	PH3 valve closed
5/17/2010	3:14:18 PM	SiCl4 pre valve closed
5/17/2010	3:14:18 PM	SiCl4 post valve closed
5/17/2010	3:14:18 PM	Bubbler valve closed
5/17/2010	3:14:18 PM	Main Vac valve opened
5/17/2010	3:14:18 PM	Bypass valve opened
5/17/2010	3:14:18 PM	Helium MFC set to  0.000000
5/17/2010	3:14:18 PM	H2 MFC set to  0.000000
5/17/2010	3:14:18 PM	BCl3 MFC set to  0.000000
5/17/2010	3:14:18 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:14:18 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:14:18 PM	Tube furnace set to 0
5/17/2010	3:19:18 PM	Helium valve closed
5/17/2010	3:19:18 PM	H2 valve closed
5/17/2010	3:19:18 PM	BCl3 valve closed
5/17/2010	3:19:18 PM	PH3 valve closed
5/17/2010	3:19:18 PM	SiCl4 pre valve closed
5/17/2010	3:19:18 PM	SiCl4 post valve closed
5/17/2010	3:19:18 PM	Bubbler valve closed
5/17/2010	3:19:18 PM	Main Vac valve opened
5/17/2010	3:19:18 PM	Bypass valve opened
5/17/2010	3:19:18 PM	Helium MFC set to  0.000000
5/17/2010	3:19:18 PM	H2 MFC set to  0.000000
5/17/2010	3:19:18 PM	BCl3 MFC set to  0.000000
5/17/2010	3:19:18 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:19:18 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:19:18 PM	Tube furnace set to 0
5/17/2010	3:19:19 PM	Run finished at 3:19 PM
5/17/2010	3:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	3:31:24 PM	Main Vac valve closed
5/17/2010	3:31:26 PM	Bypass valve closed
5/17/2010	3:31:48 PM	Bypass valve opened
5/17/2010	3:31:49 PM	Main Vac valve opened
5/17/2010	3:32:38 PM	Recipe started at 3:32 PM
5/17/2010	3:32:38 PM	Helium valve closed
5/17/2010	3:32:38 PM	BCl3 valve closed
5/17/2010	3:32:38 PM	PH3 valve closed
5/17/2010	3:32:38 PM	SiCl4 pre valve closed
5/17/2010	3:32:38 PM	SiCl4 post valve closed
5/17/2010	3:32:38 PM	Main Vac valve closed
5/17/2010	3:32:38 PM	Bypass valve closed
5/17/2010	3:32:38 PM	Bubbler valve closed
5/17/2010	3:32:38 PM	H2 valve opened
5/17/2010	3:32:38 PM	Helium MFC set to  0.000000
5/17/2010	3:32:38 PM	H2 MFC set to  500.000000
5/17/2010	3:32:38 PM	BCl3 MFC set to  0.000000
5/17/2010	3:32:38 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:32:38 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:32:38 PM	Tube furnace set to 0
5/17/2010	3:33:58 PM	Helium valve closed
5/17/2010	3:33:58 PM	BCl3 valve closed
5/17/2010	3:33:58 PM	PH3 valve closed
5/17/2010	3:33:58 PM	SiCl4 pre valve closed
5/17/2010	3:33:58 PM	SiCl4 post valve closed
5/17/2010	3:33:58 PM	Main Vac valve closed
5/17/2010	3:33:58 PM	Bypass valve closed
5/17/2010	3:33:58 PM	H2 valve opened
5/17/2010	3:33:58 PM	Bubbler valve opened
5/17/2010	3:33:58 PM	Helium MFC set to  0.000000
5/17/2010	3:33:58 PM	H2 MFC set to  400.000000
5/17/2010	3:33:58 PM	BCl3 MFC set to  0.000000
5/17/2010	3:33:58 PM	SiCl4 MFC set to  0.000000
5/17/2010	3:33:58 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:33:59 PM	Tube furnace set to 1000
5/17/2010	3:58:59 PM	Helium valve closed
5/17/2010	3:58:59 PM	PH3 valve closed
5/17/2010	3:58:59 PM	Main Vac valve closed
5/17/2010	3:58:59 PM	Bypass valve closed
5/17/2010	3:58:59 PM	H2 valve opened
5/17/2010	3:58:59 PM	BCl3 valve opened
5/17/2010	3:58:59 PM	SiCl4 pre valve opened
5/17/2010	3:58:59 PM	SiCl4 post valve opened
5/17/2010	3:58:59 PM	Bubbler valve opened
5/17/2010	3:58:59 PM	Helium MFC set to  0.000000
5/17/2010	3:58:59 PM	H2 MFC set to  475.000000
5/17/2010	3:58:59 PM	BCl3 MFC set to  35.000000
5/17/2010	3:58:59 PM	SiCl4 MFC set to  375.000000
5/17/2010	3:58:59 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	3:58:59 PM	Tube furnace set to 1000
5/17/2010	4:18:59 PM	H2 valve closed
5/17/2010	4:18:59 PM	BCl3 valve closed
5/17/2010	4:18:59 PM	PH3 valve closed
5/17/2010	4:18:59 PM	SiCl4 pre valve closed
5/17/2010	4:18:59 PM	SiCl4 post valve closed
5/17/2010	4:18:59 PM	Main Vac valve closed
5/17/2010	4:18:59 PM	Bypass valve closed
5/17/2010	4:18:59 PM	Helium valve opened
5/17/2010	4:18:59 PM	Bubbler valve opened
5/17/2010	4:18:59 PM	Helium MFC set to  400.000000
5/17/2010	4:18:59 PM	H2 MFC set to  0.000000
5/17/2010	4:18:59 PM	BCl3 MFC set to  0.000000
5/17/2010	4:18:59 PM	SiCl4 MFC set to  0.000000
5/17/2010	4:18:59 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	4:18:59 PM	Tube furnace set to 0
5/17/2010	4:38:59 PM	Helium valve closed
5/17/2010	4:38:59 PM	H2 valve closed
5/17/2010	4:38:59 PM	BCl3 valve closed
5/17/2010	4:38:59 PM	PH3 valve closed
5/17/2010	4:38:59 PM	SiCl4 pre valve closed
5/17/2010	4:38:59 PM	SiCl4 post valve closed
5/17/2010	4:38:59 PM	Main Vac valve closed
5/17/2010	4:38:59 PM	Bypass valve closed
5/17/2010	4:38:59 PM	Bubbler valve closed
5/17/2010	4:38:59 PM	Helium MFC set to  0.000000
5/17/2010	4:38:59 PM	H2 MFC set to  0.000000
5/17/2010	4:38:59 PM	BCl3 MFC set to  0.000000
5/17/2010	4:38:59 PM	SiCl4 MFC set to  0.000000
5/17/2010	4:38:59 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	4:38:59 PM	Tube furnace set to 0
5/17/2010	4:38:59 PM	Run finished at 4:38 PM
5/17/2010	4:40:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	4:40:52 PM	Recipe started at 4:40 PM
5/17/2010	4:40:52 PM	Helium valve closed
5/17/2010	4:40:52 PM	H2 valve closed
5/17/2010	4:40:52 PM	BCl3 valve closed
5/17/2010	4:40:52 PM	PH3 valve closed
5/17/2010	4:40:52 PM	SiCl4 pre valve closed
5/17/2010	4:40:52 PM	SiCl4 post valve closed
5/17/2010	4:40:52 PM	Main Vac valve closed
5/17/2010	4:40:52 PM	Bubbler valve closed
5/17/2010	4:40:52 PM	Bypass valve opened
5/17/2010	4:40:52 PM	Helium MFC set to  0.000000
5/17/2010	4:40:52 PM	H2 MFC set to  0.000000
5/17/2010	4:40:52 PM	BCl3 MFC set to  0.000000
5/17/2010	4:40:52 PM	SiCl4 MFC set to  0.000000
5/17/2010	4:40:52 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	4:40:53 PM	Tube furnace set to 0
5/17/2010	4:41:35 PM	Helium valve closed
5/17/2010	4:41:35 PM	H2 valve closed
5/17/2010	4:41:35 PM	BCl3 valve closed
5/17/2010	4:41:35 PM	PH3 valve closed
5/17/2010	4:41:35 PM	SiCl4 pre valve closed
5/17/2010	4:41:35 PM	SiCl4 post valve closed
5/17/2010	4:41:35 PM	Bubbler valve closed
5/17/2010	4:41:35 PM	Main Vac valve opened
5/17/2010	4:41:35 PM	Bypass valve opened
5/17/2010	4:41:35 PM	Helium MFC set to  0.000000
5/17/2010	4:41:35 PM	H2 MFC set to  0.000000
5/17/2010	4:41:35 PM	BCl3 MFC set to  0.000000
5/17/2010	4:41:35 PM	SiCl4 MFC set to  0.000000
5/17/2010	4:41:35 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	4:41:36 PM	Tube furnace set to 0
5/17/2010	4:41:36 PM	Run finished at 4:41 PM
5/17/2010	4:41:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	5:10:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	5:10:50 PM	Recipe started at 5:10 PM
5/17/2010	5:10:50 PM	H2 valve closed
5/17/2010	5:10:50 PM	BCl3 valve closed
5/17/2010	5:10:50 PM	PH3 valve closed
5/17/2010	5:10:50 PM	SiCl4 pre valve closed
5/17/2010	5:10:50 PM	SiCl4 post valve closed
5/17/2010	5:10:50 PM	Main Vac valve closed
5/17/2010	5:10:50 PM	Bypass valve closed
5/17/2010	5:10:50 PM	Bubbler valve closed
5/17/2010	5:10:50 PM	Helium valve opened
5/17/2010	5:10:50 PM	Helium MFC set to  500.000000
5/17/2010	5:10:50 PM	H2 MFC set to  0.000000
5/17/2010	5:10:50 PM	BCl3 MFC set to  0.000000
5/17/2010	5:10:50 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:10:50 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:10:50 PM	Tube furnace set to 0
5/17/2010	5:12:10 PM	Helium valve closed
5/17/2010	5:12:10 PM	H2 valve closed
5/17/2010	5:12:10 PM	BCl3 valve closed
5/17/2010	5:12:10 PM	PH3 valve closed
5/17/2010	5:12:10 PM	SiCl4 pre valve closed
5/17/2010	5:12:10 PM	SiCl4 post valve closed
5/17/2010	5:12:10 PM	Main Vac valve closed
5/17/2010	5:12:10 PM	Bypass valve closed
5/17/2010	5:12:10 PM	Bubbler valve closed
5/17/2010	5:12:10 PM	Helium MFC set to  0.000000
5/17/2010	5:12:10 PM	H2 MFC set to  0.000000
5/17/2010	5:12:10 PM	BCl3 MFC set to  0.000000
5/17/2010	5:12:10 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:12:10 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:12:10 PM	Tube furnace set to 0
5/17/2010	5:12:11 PM	Run finished at 5:12 PM
5/17/2010	5:12:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	5:24:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	5:24:25 PM	Recipe started at 5:24 PM
5/17/2010	5:24:25 PM	Helium valve closed
5/17/2010	5:24:25 PM	H2 valve closed
5/17/2010	5:24:25 PM	BCl3 valve closed
5/17/2010	5:24:25 PM	PH3 valve closed
5/17/2010	5:24:25 PM	SiCl4 pre valve closed
5/17/2010	5:24:25 PM	SiCl4 post valve closed
5/17/2010	5:24:25 PM	Main Vac valve closed
5/17/2010	5:24:25 PM	Bubbler valve closed
5/17/2010	5:24:25 PM	Bypass valve opened
5/17/2010	5:24:25 PM	Helium MFC set to  0.000000
5/17/2010	5:24:25 PM	H2 MFC set to  0.000000
5/17/2010	5:24:25 PM	BCl3 MFC set to  0.000000
5/17/2010	5:24:25 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:24:25 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:24:25 PM	Tube furnace set to 0
5/17/2010	5:25:12 PM	Helium valve closed
5/17/2010	5:25:12 PM	H2 valve closed
5/17/2010	5:25:12 PM	BCl3 valve closed
5/17/2010	5:25:12 PM	PH3 valve closed
5/17/2010	5:25:12 PM	SiCl4 pre valve closed
5/17/2010	5:25:12 PM	SiCl4 post valve closed
5/17/2010	5:25:12 PM	Bubbler valve closed
5/17/2010	5:25:12 PM	Main Vac valve opened
5/17/2010	5:25:12 PM	Bypass valve opened
5/17/2010	5:25:12 PM	Helium MFC set to  0.000000
5/17/2010	5:25:12 PM	H2 MFC set to  0.000000
5/17/2010	5:25:12 PM	BCl3 MFC set to  0.000000
5/17/2010	5:25:12 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:25:12 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:25:12 PM	Tube furnace set to 0
5/17/2010	5:25:12 PM	Run finished at 5:25 PM
5/17/2010	5:25:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	5:25:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	5:25:38 PM	Recipe started at 5:25 PM
5/17/2010	5:25:38 PM	H2 valve closed
5/17/2010	5:25:38 PM	BCl3 valve closed
5/17/2010	5:25:38 PM	PH3 valve closed
5/17/2010	5:25:38 PM	SiCl4 pre valve closed
5/17/2010	5:25:38 PM	SiCl4 post valve closed
5/17/2010	5:25:38 PM	Main Vac valve closed
5/17/2010	5:25:38 PM	Bypass valve closed
5/17/2010	5:25:38 PM	Bubbler valve closed
5/17/2010	5:25:38 PM	Helium valve opened
5/17/2010	5:25:38 PM	Helium MFC set to  500.000000
5/17/2010	5:25:38 PM	H2 MFC set to  0.000000
5/17/2010	5:25:38 PM	BCl3 MFC set to  0.000000
5/17/2010	5:25:38 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:25:38 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:25:38 PM	Tube furnace set to 0
5/17/2010	5:25:51 PM	Helium valve closed
5/17/2010	5:25:51 PM	H2 valve closed
5/17/2010	5:25:51 PM	BCl3 valve closed
5/17/2010	5:25:51 PM	PH3 valve closed
5/17/2010	5:25:51 PM	SiCl4 pre valve closed
5/17/2010	5:25:51 PM	SiCl4 post valve closed
5/17/2010	5:25:51 PM	Main Vac valve closed
5/17/2010	5:25:51 PM	Bypass valve closed
5/17/2010	5:25:51 PM	Bubbler valve closed
5/17/2010	5:25:51 PM	Helium MFC set to  0.000000
5/17/2010	5:25:51 PM	H2 MFC set to  0.000000
5/17/2010	5:25:51 PM	BCl3 MFC set to  0.000000
5/17/2010	5:25:51 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:25:51 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:25:52 PM	Tube furnace set to 0
5/17/2010	5:26:07 PM	Helium valve closed
5/17/2010	5:26:07 PM	H2 valve closed
5/17/2010	5:26:07 PM	BCl3 valve closed
5/17/2010	5:26:07 PM	PH3 valve closed
5/17/2010	5:26:07 PM	SiCl4 pre valve closed
5/17/2010	5:26:07 PM	SiCl4 post valve closed
5/17/2010	5:26:07 PM	Main Vac valve closed
5/17/2010	5:26:07 PM	Bubbler valve closed
5/17/2010	5:26:07 PM	Bypass valve opened
5/17/2010	5:26:07 PM	Helium MFC set to  0.000000
5/17/2010	5:26:07 PM	H2 MFC set to  0.000000
5/17/2010	5:26:07 PM	BCl3 MFC set to  0.000000
5/17/2010	5:26:07 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:26:07 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:26:07 PM	Tube furnace set to 0
5/17/2010	5:26:22 PM	Helium valve closed
5/17/2010	5:26:22 PM	H2 valve closed
5/17/2010	5:26:22 PM	BCl3 valve closed
5/17/2010	5:26:22 PM	PH3 valve closed
5/17/2010	5:26:22 PM	SiCl4 pre valve closed
5/17/2010	5:26:22 PM	SiCl4 post valve closed
5/17/2010	5:26:22 PM	Bubbler valve closed
5/17/2010	5:26:22 PM	Main Vac valve opened
5/17/2010	5:26:22 PM	Bypass valve opened
5/17/2010	5:26:22 PM	Helium MFC set to  0.000000
5/17/2010	5:26:22 PM	H2 MFC set to  0.000000
5/17/2010	5:26:22 PM	BCl3 MFC set to  0.000000
5/17/2010	5:26:22 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:26:22 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:26:22 PM	Tube furnace set to 0
5/17/2010	5:31:22 PM	H2 valve closed
5/17/2010	5:31:22 PM	BCl3 valve closed
5/17/2010	5:31:22 PM	PH3 valve closed
5/17/2010	5:31:22 PM	SiCl4 pre valve closed
5/17/2010	5:31:22 PM	SiCl4 post valve closed
5/17/2010	5:31:22 PM	Main Vac valve closed
5/17/2010	5:31:22 PM	Bypass valve closed
5/17/2010	5:31:22 PM	Bubbler valve closed
5/17/2010	5:31:22 PM	Helium valve opened
5/17/2010	5:31:22 PM	Helium MFC set to  500.000000
5/17/2010	5:31:22 PM	H2 MFC set to  0.000000
5/17/2010	5:31:22 PM	BCl3 MFC set to  0.000000
5/17/2010	5:31:22 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:31:22 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:31:22 PM	Tube furnace set to 0
5/17/2010	5:32:43 PM	Helium valve closed
5/17/2010	5:32:43 PM	H2 valve closed
5/17/2010	5:32:43 PM	BCl3 valve closed
5/17/2010	5:32:43 PM	PH3 valve closed
5/17/2010	5:32:43 PM	SiCl4 pre valve closed
5/17/2010	5:32:43 PM	SiCl4 post valve closed
5/17/2010	5:32:43 PM	Main Vac valve closed
5/17/2010	5:32:43 PM	Bypass valve closed
5/17/2010	5:32:43 PM	Bubbler valve closed
5/17/2010	5:32:43 PM	Helium MFC set to  0.000000
5/17/2010	5:32:43 PM	H2 MFC set to  0.000000
5/17/2010	5:32:43 PM	BCl3 MFC set to  0.000000
5/17/2010	5:32:43 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:32:43 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:32:44 PM	Tube furnace set to 0
5/17/2010	5:32:59 PM	Helium valve closed
5/17/2010	5:32:59 PM	H2 valve closed
5/17/2010	5:32:59 PM	BCl3 valve closed
5/17/2010	5:32:59 PM	PH3 valve closed
5/17/2010	5:32:59 PM	SiCl4 pre valve closed
5/17/2010	5:32:59 PM	SiCl4 post valve closed
5/17/2010	5:32:59 PM	Main Vac valve closed
5/17/2010	5:32:59 PM	Bubbler valve closed
5/17/2010	5:32:59 PM	Bypass valve opened
5/17/2010	5:32:59 PM	Helium MFC set to  0.000000
5/17/2010	5:32:59 PM	H2 MFC set to  0.000000
5/17/2010	5:32:59 PM	BCl3 MFC set to  0.000000
5/17/2010	5:32:59 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:32:59 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:32:59 PM	Tube furnace set to 0
5/17/2010	5:33:31 PM	Helium valve closed
5/17/2010	5:33:31 PM	H2 valve closed
5/17/2010	5:33:31 PM	BCl3 valve closed
5/17/2010	5:33:31 PM	PH3 valve closed
5/17/2010	5:33:31 PM	SiCl4 pre valve closed
5/17/2010	5:33:31 PM	SiCl4 post valve closed
5/17/2010	5:33:31 PM	Bubbler valve closed
5/17/2010	5:33:31 PM	Main Vac valve opened
5/17/2010	5:33:31 PM	Bypass valve opened
5/17/2010	5:33:31 PM	Helium MFC set to  0.000000
5/17/2010	5:33:31 PM	H2 MFC set to  0.000000
5/17/2010	5:33:31 PM	BCl3 MFC set to  0.000000
5/17/2010	5:33:31 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:33:31 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:33:31 PM	Tube furnace set to 0
5/17/2010	5:38:31 PM	H2 valve closed
5/17/2010	5:38:31 PM	BCl3 valve closed
5/17/2010	5:38:31 PM	PH3 valve closed
5/17/2010	5:38:31 PM	SiCl4 pre valve closed
5/17/2010	5:38:31 PM	SiCl4 post valve closed
5/17/2010	5:38:31 PM	Main Vac valve closed
5/17/2010	5:38:31 PM	Bypass valve closed
5/17/2010	5:38:31 PM	Bubbler valve closed
5/17/2010	5:38:31 PM	Helium valve opened
5/17/2010	5:38:31 PM	Helium MFC set to  500.000000
5/17/2010	5:38:31 PM	H2 MFC set to  0.000000
5/17/2010	5:38:31 PM	BCl3 MFC set to  0.000000
5/17/2010	5:38:31 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:38:31 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:38:31 PM	Tube furnace set to 0
5/17/2010	5:39:52 PM	Helium valve closed
5/17/2010	5:39:52 PM	H2 valve closed
5/17/2010	5:39:52 PM	BCl3 valve closed
5/17/2010	5:39:52 PM	PH3 valve closed
5/17/2010	5:39:52 PM	SiCl4 pre valve closed
5/17/2010	5:39:52 PM	SiCl4 post valve closed
5/17/2010	5:39:52 PM	Main Vac valve closed
5/17/2010	5:39:52 PM	Bypass valve closed
5/17/2010	5:39:52 PM	Bubbler valve closed
5/17/2010	5:39:52 PM	Helium MFC set to  0.000000
5/17/2010	5:39:52 PM	H2 MFC set to  0.000000
5/17/2010	5:39:52 PM	BCl3 MFC set to  0.000000
5/17/2010	5:39:52 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:39:52 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:39:52 PM	Tube furnace set to 0
5/17/2010	5:40:07 PM	Helium valve closed
5/17/2010	5:40:07 PM	H2 valve closed
5/17/2010	5:40:07 PM	BCl3 valve closed
5/17/2010	5:40:07 PM	PH3 valve closed
5/17/2010	5:40:07 PM	SiCl4 pre valve closed
5/17/2010	5:40:07 PM	SiCl4 post valve closed
5/17/2010	5:40:07 PM	Main Vac valve closed
5/17/2010	5:40:07 PM	Bubbler valve closed
5/17/2010	5:40:07 PM	Bypass valve opened
5/17/2010	5:40:07 PM	Helium MFC set to  0.000000
5/17/2010	5:40:07 PM	H2 MFC set to  0.000000
5/17/2010	5:40:07 PM	BCl3 MFC set to  0.000000
5/17/2010	5:40:07 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:40:07 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:40:07 PM	Tube furnace set to 0
5/17/2010	5:40:39 PM	Helium valve closed
5/17/2010	5:40:39 PM	H2 valve closed
5/17/2010	5:40:39 PM	BCl3 valve closed
5/17/2010	5:40:39 PM	PH3 valve closed
5/17/2010	5:40:39 PM	SiCl4 pre valve closed
5/17/2010	5:40:39 PM	SiCl4 post valve closed
5/17/2010	5:40:39 PM	Bubbler valve closed
5/17/2010	5:40:39 PM	Main Vac valve opened
5/17/2010	5:40:39 PM	Bypass valve opened
5/17/2010	5:40:39 PM	Helium MFC set to  0.000000
5/17/2010	5:40:39 PM	H2 MFC set to  0.000000
5/17/2010	5:40:39 PM	BCl3 MFC set to  0.000000
5/17/2010	5:40:39 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:40:39 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:40:39 PM	Tube furnace set to 0
5/17/2010	5:44:15 PM	Helium valve closed
5/17/2010	5:44:15 PM	H2 valve closed
5/17/2010	5:44:15 PM	BCl3 valve closed
5/17/2010	5:44:15 PM	PH3 valve closed
5/17/2010	5:44:15 PM	SiCl4 pre valve closed
5/17/2010	5:44:15 PM	SiCl4 post valve closed
5/17/2010	5:44:15 PM	Bubbler valve closed
5/17/2010	5:44:15 PM	Main Vac valve opened
5/17/2010	5:44:15 PM	Bypass valve opened
5/17/2010	5:44:15 PM	Helium MFC set to  0.000000
5/17/2010	5:44:15 PM	H2 MFC set to  0.000000
5/17/2010	5:44:15 PM	BCl3 MFC set to  0.000000
5/17/2010	5:44:15 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:44:15 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:44:15 PM	Tube furnace set to 0
5/17/2010	5:44:16 PM	Run finished at 5:44 PM
5/17/2010	5:44:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/17/2010	5:44:24 PM	Tube furnace set to 100
5/17/2010	5:44:37 PM	Helium MFC set to  100.000000
5/17/2010	5:44:37 PM	Helium valve opened
5/17/2010	5:47:45 PM	Helium MFC set to  0.000000
5/17/2010	5:47:45 PM	Helium valve closed
5/17/2010	5:49:12 PM	Main Vac valve closed
5/17/2010	5:49:13 PM	Bypass valve closed
5/17/2010	5:49:27 PM	Bypass valve opened
5/17/2010	5:49:28 PM	Main Vac valve opened
5/17/2010	5:52:21 PM	Recipe started at 5:52 PM
5/17/2010	5:52:21 PM	Helium valve closed
5/17/2010	5:52:21 PM	BCl3 valve closed
5/17/2010	5:52:21 PM	PH3 valve closed
5/17/2010	5:52:21 PM	SiCl4 pre valve closed
5/17/2010	5:52:21 PM	SiCl4 post valve closed
5/17/2010	5:52:21 PM	Main Vac valve closed
5/17/2010	5:52:21 PM	Bypass valve closed
5/17/2010	5:52:21 PM	Bubbler valve closed
5/17/2010	5:52:21 PM	H2 valve opened
5/17/2010	5:52:21 PM	Helium MFC set to  0.000000
5/17/2010	5:52:21 PM	H2 MFC set to  500.000000
5/17/2010	5:52:21 PM	BCl3 MFC set to  0.000000
5/17/2010	5:52:21 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:52:21 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:52:22 PM	Tube furnace set to 0
5/17/2010	5:53:42 PM	Helium valve closed
5/17/2010	5:53:42 PM	BCl3 valve closed
5/17/2010	5:53:42 PM	PH3 valve closed
5/17/2010	5:53:42 PM	SiCl4 pre valve closed
5/17/2010	5:53:42 PM	SiCl4 post valve closed
5/17/2010	5:53:42 PM	Main Vac valve closed
5/17/2010	5:53:42 PM	Bypass valve closed
5/17/2010	5:53:42 PM	H2 valve opened
5/17/2010	5:53:42 PM	Bubbler valve opened
5/17/2010	5:53:42 PM	Helium MFC set to  0.000000
5/17/2010	5:53:42 PM	H2 MFC set to  400.000000
5/17/2010	5:53:42 PM	BCl3 MFC set to  0.000000
5/17/2010	5:53:42 PM	SiCl4 MFC set to  0.000000
5/17/2010	5:53:42 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	5:53:42 PM	Tube furnace set to 1002
5/17/2010	6:15:42 PM	Helium valve closed
5/17/2010	6:15:42 PM	PH3 valve closed
5/17/2010	6:15:42 PM	Main Vac valve closed
5/17/2010	6:15:42 PM	Bypass valve closed
5/17/2010	6:15:42 PM	H2 valve opened
5/17/2010	6:15:42 PM	BCl3 valve opened
5/17/2010	6:15:42 PM	SiCl4 pre valve opened
5/17/2010	6:15:42 PM	SiCl4 post valve opened
5/17/2010	6:15:42 PM	Bubbler valve opened
5/17/2010	6:15:42 PM	Helium MFC set to  0.000000
5/17/2010	6:15:42 PM	H2 MFC set to  450.000000
5/17/2010	6:15:42 PM	BCl3 MFC set to  35.000000
5/17/2010	6:15:42 PM	SiCl4 MFC set to  400.000000
5/17/2010	6:15:42 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:15:42 PM	Tube furnace set to 1000
5/17/2010	6:35:42 PM	H2 valve closed
5/17/2010	6:35:42 PM	BCl3 valve closed
5/17/2010	6:35:42 PM	PH3 valve closed
5/17/2010	6:35:42 PM	SiCl4 pre valve closed
5/17/2010	6:35:42 PM	SiCl4 post valve closed
5/17/2010	6:35:42 PM	Main Vac valve closed
5/17/2010	6:35:42 PM	Bypass valve closed
5/17/2010	6:35:42 PM	Helium valve opened
5/17/2010	6:35:42 PM	Bubbler valve opened
5/17/2010	6:35:42 PM	Helium MFC set to  400.000000
5/17/2010	6:35:42 PM	H2 MFC set to  0.000000
5/17/2010	6:35:42 PM	BCl3 MFC set to  0.000000
5/17/2010	6:35:42 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:35:42 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:35:42 PM	Tube furnace set to 0
5/17/2010	6:41:44 PM	Helium valve closed
5/17/2010	6:41:44 PM	H2 valve closed
5/17/2010	6:41:44 PM	BCl3 valve closed
5/17/2010	6:41:44 PM	PH3 valve closed
5/17/2010	6:41:44 PM	SiCl4 pre valve closed
5/17/2010	6:41:44 PM	SiCl4 post valve closed
5/17/2010	6:41:44 PM	Main Vac valve closed
5/17/2010	6:41:44 PM	Bypass valve closed
5/17/2010	6:41:44 PM	Bubbler valve closed
5/17/2010	6:41:44 PM	Helium MFC set to  0.000000
5/17/2010	6:41:44 PM	H2 MFC set to  0.000000
5/17/2010	6:41:44 PM	BCl3 MFC set to  0.000000
5/17/2010	6:41:44 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:41:44 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:41:44 PM	Tube furnace set to 0
5/17/2010	6:41:45 PM	Run finished at 6:41 PM
5/17/2010	6:42:46 PM	Helium MFC set to  100.000000
5/17/2010	6:42:46 PM	Helium valve opened
5/17/2010	6:42:51 PM	Bubbler valve opened
5/17/2010	6:42:56 PM	Helium MFC set to  400.000000
5/17/2010	6:43:00 PM	BCl3 MFC set to  35.000000
5/17/2010	6:43:01 PM	BCl3 valve opened
5/17/2010	6:43:22 PM	BCl3 valve closed
5/17/2010	6:43:23 PM	BCl3 valve opened
5/17/2010	6:43:37 PM	BCl3 MFC set to  0.000000
5/17/2010	6:43:37 PM	BCl3 valve closed
5/17/2010	6:44:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/17/2010	6:44:11 PM	Recipe started at 6:44 PM
5/17/2010	6:44:11 PM	Helium valve closed
5/17/2010	6:44:11 PM	H2 valve closed
5/17/2010	6:44:11 PM	BCl3 valve closed
5/17/2010	6:44:11 PM	PH3 valve closed
5/17/2010	6:44:11 PM	SiCl4 pre valve closed
5/17/2010	6:44:11 PM	SiCl4 post valve closed
5/17/2010	6:44:11 PM	Main Vac valve closed
5/17/2010	6:44:11 PM	Bypass valve closed
5/17/2010	6:44:11 PM	Bubbler valve closed
5/17/2010	6:44:11 PM	Helium MFC set to  0.000000
5/17/2010	6:44:11 PM	H2 MFC set to  0.000000
5/17/2010	6:44:11 PM	BCl3 MFC set to  0.000000
5/17/2010	6:44:11 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:44:11 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:44:11 PM	Tube furnace set to 0
5/17/2010	6:44:11 PM	Run finished at 6:44 PM
5/17/2010	6:44:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/17/2010	6:44:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	6:44:17 PM	Recipe started at 6:44 PM
5/17/2010	6:44:17 PM	Helium valve closed
5/17/2010	6:44:17 PM	H2 valve closed
5/17/2010	6:44:17 PM	BCl3 valve closed
5/17/2010	6:44:17 PM	PH3 valve closed
5/17/2010	6:44:17 PM	SiCl4 pre valve closed
5/17/2010	6:44:17 PM	SiCl4 post valve closed
5/17/2010	6:44:17 PM	Main Vac valve closed
5/17/2010	6:44:17 PM	Bubbler valve closed
5/17/2010	6:44:17 PM	Bypass valve opened
5/17/2010	6:44:17 PM	Helium MFC set to  0.000000
5/17/2010	6:44:17 PM	H2 MFC set to  0.000000
5/17/2010	6:44:17 PM	BCl3 MFC set to  0.000000
5/17/2010	6:44:17 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:44:17 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:44:17 PM	Tube furnace set to 0
5/17/2010	6:44:22 PM	Run aborted at 6:44 PM
5/17/2010	6:44:22 PM	Helium valve closed
5/17/2010	6:44:22 PM	H2 valve closed
5/17/2010	6:44:22 PM	BCl3 valve closed
5/17/2010	6:44:22 PM	PH3 valve closed
5/17/2010	6:44:22 PM	SiCl4 pre valve closed
5/17/2010	6:44:22 PM	SiCl4 post valve closed
5/17/2010	6:44:22 PM	Bypass valve closed
5/17/2010	6:44:22 PM	Main Vac valve closed
5/17/2010	6:44:22 PM	Bubbler valve closed
5/17/2010	6:44:22 PM	Helium MFC set to  0.000000
5/17/2010	6:44:22 PM	H2 MFC set to  0.000000
5/17/2010	6:44:22 PM	BCl3 MFC set to  0.000000
5/17/2010	6:44:22 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:44:22 PM	Tube furnace set to 0
5/17/2010	6:44:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	6:44:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	6:44:26 PM	Recipe started at 6:44 PM
5/17/2010	6:44:26 PM	H2 valve closed
5/17/2010	6:44:26 PM	BCl3 valve closed
5/17/2010	6:44:26 PM	PH3 valve closed
5/17/2010	6:44:26 PM	SiCl4 pre valve closed
5/17/2010	6:44:26 PM	SiCl4 post valve closed
5/17/2010	6:44:26 PM	Main Vac valve closed
5/17/2010	6:44:26 PM	Bypass valve closed
5/17/2010	6:44:26 PM	Bubbler valve closed
5/17/2010	6:44:26 PM	Helium valve opened
5/17/2010	6:44:26 PM	Helium MFC set to  500.000000
5/17/2010	6:44:26 PM	H2 MFC set to  0.000000
5/17/2010	6:44:26 PM	BCl3 MFC set to  0.000000
5/17/2010	6:44:26 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:44:26 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:44:26 PM	Tube furnace set to 0
5/17/2010	6:45:04 PM	Helium valve closed
5/17/2010	6:45:04 PM	H2 valve closed
5/17/2010	6:45:04 PM	BCl3 valve closed
5/17/2010	6:45:04 PM	PH3 valve closed
5/17/2010	6:45:04 PM	SiCl4 pre valve closed
5/17/2010	6:45:04 PM	SiCl4 post valve closed
5/17/2010	6:45:04 PM	Main Vac valve closed
5/17/2010	6:45:04 PM	Bypass valve closed
5/17/2010	6:45:04 PM	Bubbler valve closed
5/17/2010	6:45:04 PM	Helium MFC set to  0.000000
5/17/2010	6:45:04 PM	H2 MFC set to  0.000000
5/17/2010	6:45:04 PM	BCl3 MFC set to  0.000000
5/17/2010	6:45:04 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:45:04 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:45:04 PM	Tube furnace set to 0
5/17/2010	6:45:04 PM	Run finished at 6:45 PM
5/17/2010	6:45:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2010	6:46:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2010	6:46:52 PM	Recipe started at 6:46 PM
5/17/2010	6:46:52 PM	Helium valve closed
5/17/2010	6:46:52 PM	H2 valve closed
5/17/2010	6:46:52 PM	BCl3 valve closed
5/17/2010	6:46:52 PM	PH3 valve closed
5/17/2010	6:46:52 PM	SiCl4 pre valve closed
5/17/2010	6:46:52 PM	SiCl4 post valve closed
5/17/2010	6:46:52 PM	Main Vac valve closed
5/17/2010	6:46:52 PM	Bubbler valve closed
5/17/2010	6:46:52 PM	Bypass valve opened
5/17/2010	6:46:52 PM	Helium MFC set to  0.000000
5/17/2010	6:46:52 PM	H2 MFC set to  0.000000
5/17/2010	6:46:52 PM	BCl3 MFC set to  0.000000
5/17/2010	6:46:52 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:46:52 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:46:52 PM	Tube furnace set to 0
5/17/2010	6:47:30 PM	Helium valve closed
5/17/2010	6:47:30 PM	H2 valve closed
5/17/2010	6:47:30 PM	BCl3 valve closed
5/17/2010	6:47:30 PM	PH3 valve closed
5/17/2010	6:47:30 PM	SiCl4 pre valve closed
5/17/2010	6:47:30 PM	SiCl4 post valve closed
5/17/2010	6:47:30 PM	Bubbler valve closed
5/17/2010	6:47:30 PM	Main Vac valve opened
5/17/2010	6:47:30 PM	Bypass valve opened
5/17/2010	6:47:30 PM	Helium MFC set to  0.000000
5/17/2010	6:47:30 PM	H2 MFC set to  0.000000
5/17/2010	6:47:30 PM	BCl3 MFC set to  0.000000
5/17/2010	6:47:30 PM	SiCl4 MFC set to  0.000000
5/17/2010	6:47:30 PM	Bypass solenoid MFC set to  0.000000
5/17/2010	6:47:30 PM	Tube furnace set to 0
5/17/2010	6:47:31 PM	Run finished at 6:47 PM
5/17/2010	6:47:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
